Heat exchanger apparatus for a semiconductor wafer support and method of fabricating same
AssigneeApplied Materials, Inc.
InventorsThomas M. Duddy, Robin M. Ellis, Craig A. Bercaw
Life of this patent
Estimating the term…
Abstract
A heat exchanger apparatus including a heat exchange element and a substrate support. A clamp member is coupled to the heat exchange element and the substrate support by expanding the clamp member to an expanded state sufficient to surround a portion of the substrate support and the heat exchange element, and contracting the clamp member to couple the clamp member to the substrate support.
Claims19
A heat exchanger apparatus comprising:
- a substrate support having a heat exchange element mounting portion;
- a heat exchange element positioned within said heat exchange element mounting portion;
- and
- a clamp member providing a compression fit to retain said heat exchange element within the heat exchange element mounting portion. .
A method of manufacturing a heat exchanger apparatus, the apparatus including a substrate support, a heat exchange element, and a clamp member, comprising:
- (a) mounting the heat exchange element about a portion of the substrate support;
- (b) expanding the clamp member relative to the substrate support;
- (c) positioning the clamp member about a portion of the substrate support;
- and
- (d) contracting the clamp member into contact with a portion of the substrate support and the heat exchange element to maintain the heat exchange element in contact with the substrate support.
A method of manufacturing a wafer heater assembly comprising the steps of:
- (a) providing a heater element within a channel formed in a wafer platen;
- (b) heating a clamp member to expand the clamp member to a size that enables the clamp member to circumscribe the platen;
- (c) placing the clamp member about a portion of the heater element and a portion of the platen;
- and
- (d) cooling the clamp member to retain the heater element in the channel of the platen.
Dependencies are inferred from the claim text.