Method and apparatus for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing

An apparatus for transmitting electrical signals and fluids to and/or from a microelectronic workpiece during an electrochemical process, the apparatus comprising:

• a housing having a fluid passage coupleable to a fluid source and/or a fluid sink;
• a support member configured to removably support the microelectronic workpiece;
• a shaft coupled to the support member, rotatably received by the housing, and rotatable about a shaft axis relative to the housing, the shaft having a first end, a second end, and an internal channel positioned along the shaft axis between the first and second ends, the shaft further having at least one first hole toward the first end with the first hole extending radially from the channel to an external surface of the shaft, the shaft still further having at least one second hole toward the second end with the second hole extending from the channel to the external surface and in fluid communication with the microelectronic workpiece when the microelectronic workpiece is supported by the support member;
• a first bearing positioned between the shaft and the housing;
• a second bearing positioned between the shaft and the housing and spaced apart from the first bearing, the first and second bearings defining an annular chamber in fluid communication with the aperture of the housing and aligned with the first holes of the shaft;
• a first electrical contact positioned at the first end of the shaft to rotate with the shaft relative to the housing, the first electrical contact having a contact surface intersected by the shaft axis;
• and
• a second electrical contact coupled to the housing and engaged with the contact surface of the first electrical contact to transmit electrical signals to the shaft.

An apparatus for electrochemically processing a microelectronic workpiece, comprising:

• a reactor vessel;
• a cup disposed in the reactor vessel, the cup being configured to contain an electrochemical process fluid;
• an anode disposed in the cup and coupleable to a source of electrical potential;
• and
• a support for a microelectronic workpiece, the support including:
• an engaging member configured to engage the microelectronic workpiece;
• a shaft coupled to the engaging member and rotatable about a shaft axis, the shaft having a first end with a first electrical contact portion toward the first end, a second end opposite the first end, and an internal channel along the shaft axis between the first and second ends, the shaft further having at least one first hole toward the first end with the first hole extending radially from the channel to an external surface of the shaft, the shaft still further having at least one second hole toward the second end with the second hole extending from the channel to the external surface, the second hole being in fluid communication with the microelectronic workpiece when the microelectronic workpiece is supported by the support member, the shaft being electrically coupled to the microelectronic workpiece when the microelectronic workpiece is supported by the support member;
• a housing rotatably receiving the shaft, the housing having a fluid passage coupleable to a fluid source and/or a fluid sink, and in fluid communication with the at least one first hole when the shaft rotates relative to the housing, the housing having a second electrical contact portion engaged with the first electrical contact portion to transmit electrical signals between the first and second electrical contact portions while the shaft rotates relative to the housing;
• and
• a motor coupled to the shaft to rotate the shaft relative to the housing.

An apparatus for electrochemically processing a microelectronic workpiece, comprising:

• an enclosure;
• a reactor vessel supported by the enclosure and configured to contain a process fluid;
• an anode disposed in the cup and coupleable to a source of electrical potential;
• and
• a support for a microelectronic workpiece, the support being positioned at least proximate to the reactor vessel, the support including:
• an engaging member configured to engage the microelectronic workpiece, the engaging member having a plurality of electrical contacts positioned to engage a peripheral region of the microelectronic workpiece;
• a shaft coupled to the engaging member and rotatable about a shaft axis, the shaft having a first end with a first electrical contact portion toward the first end, a second end opposite the first end, and an internal channel along the shaft axis between the first and second ends, the shaft further having at least one first hole toward the first end with the first hole extending radially from the channel to an external surface of the shaft, the shaft still further having at least one second hole toward the second end with the second hole extending from the channel to the external surface, the second hole being in fluid communication with the microelectronic workpiece when the microelectronic workpiece is supported by the support member, the shaft being electrically coupled to the electrical contacts when the microelectronic workpiece is supported by the support member to transmit electrical current to the microelectronic workpiece;
• a housing rotatably receiving the shaft, the housing having a fluid passage coupleable to a fluid source and/or a fluid sink and in fluid communication with the at least one first hole, the housing having a second electrical contact portion engaged with the first electrical contact portion to transmit electrical signals between the first and second electrical contact portions;
• a motor coupled to the shaft to rotate the shaft relative to the housing;
• and
• a transfer mechanism configured to engage the microelectronic workpiece and move the microelectronic workpiece into and out of the engagement with the engaging member.

A method for transmitting electrical signals and fluids to and/or from a microelectronic workpiece, the method comprising:

• electrically coupling a housing to a shaft by engaging a first electrical contact fixed relative to the housing with a second electrical contact fixed relative to the shaft while the shaft rotates relative to the housing about a shaft axis;
• electrically coupling the shaft to the microelectronic workpiece;
• and
• coupling fluid in an axial channel of the shaft with fluid in the housing by aligning a fluid passage in the housing with a radial first opening extending from the axial channel to an external surface of the shaft proximate to a first end of the shaft while the shaft rotates relative to the housing and while a second opening proximate to a second end of the shaft is in fluid communication with a surface of the microelectronic workpiece.

A method for transmitting electrical signals and fluids to and/or from a microelectronic workpiece, the method comprising:

• coupling the microelectronic workpiece to a shaft having a shaft axis;
• rotating the shaft about the shaft axis;
• providing electrical current to the shaft by engaging a first electrical contact fixed relative to a housing with a second electrical contact fixed relative to the shaft;
• controlling an amount of wear of the first and/or second electrical contacts by positioning the first and second electrical contacts to intersect the shaft axis while the shaft rotates about the shaft axis;
• and
• coupling fluid in an axial channel of the shaft with fluid in the housing by aligning with a fluid passage in the housing a radial first opening extending from the axial channel to an external surface of the shaft proximate to a first end of the shaft while the shaft rotates relative to the housing and while a second opening proximate to a second end of the shaft is in fluid communication with a surface of the microelectronic workpiece.

A method for transmitting electrical signals and fluids to and/or from a microelectronic workpiece during electrochemical processing of the microelectronic workpiece, the method comprising:

• electrically coupling the microelectronic workpiece to a rotatable shaft;
• electrically coupling the rotatable shaft to a housing by engaging a first electrical contact fixed relative to the housing with a second electrical contact fixed relative to the shaft, the first and second electrical contacts intersecting a shaft axis while the shaft rotates relative to the housing about the shaft axis;
• coupling fluid in an axial channel of the shaft with fluid in the housing by aligning a plenum of the housing with a radial first opening extending from the axial channel to an external surface of the shaft proximate to a first end of the shaft while the shaft rotates relative to the housing and while a second opening proximate to a second end of the shaft is in fluid communication with a surface of the microelectronic workpiece;
• supporting the shaft relative to the housing with at least one bearing;
• and
• moving fluid toward the workpiece by directing the fluid from the plenum, through the radial first opening and into the shaft axial channel while the shaft rotates relative to the housing, and/or moving fluid away from the workpiece by directing the fluid from the workpiece, through the axial channel and the radial first opening into the plenum while the shaft rotates relative to the housing.

A method for electrochemically processing a microelectronic workplece, comprising:

• supporting the microelectronic workpiece above an anode with a support coupled to a shaft;
• rotating the shaft relative to a housing adjacent to the shaft to rotate the microelectronic workpiece;
• electrically coupling the housing to the shaft by engaging a first electrical contact fixed relative to the housing with a second electrical contact fixed relative to the shaft while the shaft rotates relative to the housing about a shaft axis;
• electrically coupling the shaft to the microelectronic workpiece;
• and
• coupling fluid in an axial channel of the shaft with fluid in the housing by aligning with a fluid passage in the housing a radial first opening extending from the axial channel to an external surface of the shaft proximate to a first end of the shaft while the shaft rotates relative to the housing and while a second opening proximate to a second end of the shaft is in fluid communication with a surface of the microelectronic workpiece.

A method for processing a microelectronic workpiece, comprising:

• receiving the microelectronic workpiece in a receiving area of an enclosure;
• moving the microelectronic workpiece from the receiving area to a processing chamber within the enclosure with an automated transfer mechanism;
• transferring the microelectronic workpiece from the automated transfer mechanism to a support member at least proximate to the processing chamber;
• electrically coupling a housing of the chamber to a shaft coupled to the support member by engaging a first electrical contact fixed relative to the housing with a second electrical contact fixed relative to the shaft while the shaft rotates relative to the housing about a shaft axis;
• electrically coupling the shaft to the microelectronic workpiece;
• and
• coupling fluid in an axial channel of the shaft with fluid in the housing by aligning with a fluid passage in the housing a radial first opening extending from the axial channel to an external surface of the shaft proximate to a first end of the shaft while the shaft rotates relative to the housing and while a second opening proximate to a second end of the shaft is in fluid communication with a surface of the microelectronic workpiece.