Solid powder trapping system
AssigneeUnited Microelectronics Corp.
InventorJACK WU
Life of this patent
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Abstract
A solid powder trapping system for filtering out solid powder from a mixture of gaseous reactants that also includes a device capable of determining the degree of powder accumulation inside the trap. The powder trapping system uses a powder trap to catch the solid powder within the gaseous mixture. A magnetic flux sensor is also installed inside the trap for measuring a magnetic flux whose strength depends on the amount of solid powder inside the trap. The magnetic flux sensor is connected to a display device so that reading from the display device reflects the amount of solid powder accumulated inside the powder trap.
Claims4
A solid powder trapping system for filtering out solid powder from a mixture of gaseous reactants that also includes a device capable of indicating the degree of powder accumulation inside the trap, comprising:
- a solid powder trap capable of receiving a mixture of gaseous reactants with suspended solid powder, filtering out solid powder and finally expelling the filtered gaseous reactants;
- a magnetic flux sensor inside the powder trap for measuring the change in magnetic flux due to a change in the state of powder accumulation inside the trap;
- and
- a display device connected to the magnetic flux sensor for measuring the change in magnetic flux so that the degree of powder accumulation inside the trap is displayed.
Dependencies are inferred from the claim text.