Method and apparatus for producing electron source

An electron source manufacturing method characterized by comprising the steps of:

• arranging on a support member a substrate having a conductor and a wiring line connected to the conductor;
• covering the conductor on the substrate with a vessel except for part of the wiring line;
• setting a desired atmosphere in the vessel;
• and
• applying a voltage to the conductor via the part of the wiring line.

An electron source manufacturing method characterized by comprising the steps of:

• arranging on a support member a substrate on which a plurality of devices, each having a pair of electrodes and a conductive film arranged between the pair of electrodes, and wiring lines which connect the plurality of devices are formed;
• covering the plurality of devices on the substrate with a vessel except for part of the wiring lines;
• setting a desired atmosphere in the vessel;
• and
• applying a voltage to the plurality of devices via the part of the wiring lines.

An electron source manufacturing method characterized by comprising the steps of:

• arranging on a support member a substrate on which a plurality of devices, each having a pair of electrodes and a conductive film arranged between the pair of electrodes, and a plurality of X-direction wiring lines and a plurality of Y-direction wiring lines which connect the plurality of devices in a matrix are formed;
• covering the plurality of devices on the substrate with a vessel except for part of the plurality of X-direction wiring lines and the plurality of Y-direction wiring lines;
• setting a desired atmosphere in the vessel;
• and
• applying a voltage to the plurality of devices via the part of the plurality of X-direction wiring lines and the plurality of Y-direction wiring lines.

An electron source manufacturing method characterized by comprising the steps of:

• arranging on a support member a substrate on which a plurality of devices, each having a pair of electrodes and a conductive film arranged between the pair of electrodes, and wiring lines which connect the plurality of devices are formed;
• covering the plurality of devices on the substrate with a vessel except for part of the wiring lines;
• setting a first atmosphere in the vessel;
• applying a voltage to the plurality of devices via the part of the wiring lines in the first atmosphere;
• setting a second atmosphere in the vessel;
• and
• applying a voltage to the plurality of devices via the part of the wiring lines in the second atmosphere.

An electron source manufacturing method characterized by comprising the steps of:

• arranging on a support member a substrate on which a plurality of devices, each having a pair of electrodes and a conductive film arranged between the pair of electrodes, and a plurality of X-direction wiring lines and a plurality of Y-direction wiring lines which connect the plurality of devices in a matrix are formed;
• covering the plurality of devices on the substrate with a vessel except for part of the plurality of X-direction wiring lines and the plurality of Y-direction wiring lines;
• setting a first atmosphere in the vessel;
• applying a voltage to the plurality of devices via the part of the plurality of X-direction wiring lines and the plurality of Y-direction wiring lines in the first atmosphere;
• setting a second atmosphere in the vessel;
• and
• applying a voltage to the plurality of devices via the part of the plurality of X-direction wiring lines and the plurality of Y-direction wiring lines in the second atmosphere.