US 2001/0034175 A1 · Method and apparatus for manufacturing image displaying apparatus

Abstract

A method and an apparatus for manufacturing an image displaying apparatus having a display panel are provided. A first substrate of the display panel on which phosphor exciting means is disposed and a second substrate of the display panel on which phosphors emitting light by the phosphor exciting means is provide are prepared under the vacuum atmosphere. Then, the first and the second substrates are carried in a getter processing chamber or bake processing chamber, and getter processing or bake processing is applied thereto under the vacuum atmosphere. After the processing, the first and the second substrates are carried in a seal processing chamber, where the substrates are heat sealed under the vacuum atmosphere. Thus, reduction of vacuum exhaust time and a high vacuum degree in manufacturing an image displaying apparatus is attained and efficiency of manufacturing is improved.

Claims109

Dependent claims

A method of manufacturing an image displaying apparatus, comprising the steps of:

a:
preparing a first substrate on which phosphor exciting means is disposed and a second substrate on which phosphors emitting light by said phosphor exciting means is disposed under the vacuum atmosphere;
b:
carrying one or both of said first and second substrates into a getter processing chamber in the vacuum atmosphere under the vacuum atmosphere, and subjecting to getter processing said one substrate carried, or one or both of said substrates carried;
and
c:
carrying said first and second substrates into a seal processing chamber in the vacuum atmosphere under the vacuum atmosphere, and heat sealing said substrates in an opposing state.

4 more elements

A method of manufacturing an image displaying apparatus, comprising the steps of:

a:
preparing a first substrate on which phosphor exciting means is disposed and a second substrate on which phosphors emitting light by said phosphor exciting means is disposed under the vacuum atmosphere;
b:
carrying said first and second substrates into a bake processing chamber in the vacuum atmosphere under the vacuum atmosphere and subjecting to bake processing both said substrates at predetermined temperature;
c:
carrying one or both of said first and second substrates into a first getter processing chamber in the vacuum atmosphere under the vacuum atmosphere, and subjecting to first getter processing said one substrate carried or one or both of said substrates carried;
d:
carrying one or both of said first and second substrates into an electron beam clean processing chamber in the vacuum atmosphere under the vacuum atmosphere, and subjecting to electron beam clean processing said one substrate carried or one or both of said substrates carried;
e:
carrying one or both of said first and second substrates into a second getter processing chamber in the vacuum atmosphere under the vacuum atmosphere, and subjecting to second getter processing said one substrate carried or one or both of said substrates carried;
and
f:
carrying said first and second substrates into a seal processing chamber in the vacuum atmosphere under the vacuum atmosphere, and heat sealing said substrates in an opposing state.

10 more elements

An apparatus for manufacturing an image displaying apparatus, comprising:

a:
a conveying means for conveying a first substrate provided with a first member for an image displaying apparatus and a second substrate provided with a second member for an image displaying apparatus;
b:
a first vacuum chamber in which said first and second substrates can be carried under the vacuum atmosphere by the conveying means;
c:
baking means, arranged in said first vacuum chamber, for bake processing said carried first and second substrates by heating said first and second substrates;
d:
a second vacuum chamber in which said first and second substrates can be carried under the vacuum atmosphere by the conveying means;
e:
getter giving means arranged in said second vacuum chamber having a getter precursor and getter activating means for activating said getter precursor;
f:
a third vacuum chamber in which said first and second substrates can be carried under the vacuum atmosphere by the conveying means;
g:
substrate arranging means, arranged in said third vacuum chamber, for arranging said first and second substrates in positions opposite to each other by orienting said first and second members for an image displaying apparatus toward inside;
and
h:
sealing means, arranged in said third vacuum chamber, for heat sealing said first and second substrates arranged in opposing positions by said substrate arranging means at predetermined temperature.

14 more elements

An apparatus for manufacturing an image displaying apparatus, comprising:

a:
a conveying means for conveying a first substrate provided with a first member for an image displaying apparatus and a second substrate provided with a second member for an image displaying apparatus;
b:
a first vacuum chamber in which said first and second substrates can be carried under the vacuum atmosphere by the conveying means;
c:
baking means, arranged in said first vacuum chamber, for bake processing said carried first and second substrates by heating said first and second substrates;
d:
a second vacuum chamber in which said first and second substrates can be carried under the vacuum atmosphere by the conveying means;
e:
getter giving means arranged in said second vacuum chamber having a getter precursor and getter activating means for activating said getter precursor;
f:
a third vacuum chamber in which one or both of said first and second substrates can be carried under the vacuum atmosphere by said conveying means;
g:
electron beam cleaning means, arranged in said third vacuum chamber, for applying electron beam clean processing by irradiating electron beams;
h:
a fourth vacuum chamber in which one or both of said first and second substrates can be carried under the vacuum atmosphere by said conveying means;
i:
second getter giving means arranged in said fourth vacuum chamber having a getter precursor and getter activating means for activating said getter precursor;
j:
a fifth vacuum chamber in which one or both of said first and second substrates can be carried under the vacuum atmosphere by said conveying means;
k:
substrate arranging means, arranged in said fifth vacuum chamber, for arranging said first and second substrates in positions opposite to each other by orienting said first and second members for an image displaying apparatus toward inside;
and
l:
sealing means, arranged in said fifth vacuum chamber, for heat sealing said first and second substrates arranged in opposing positions by said substrate arranging means at predetermined temperature.

22 more elements

An apparatus for manufacturing an image displaying apparatus, comprising:

a:
a conveying means for conveying a first substrate provided with a first member for an image displaying apparatus and a second substrate provided with a second member for an image displaying apparatus;
b:
a first decompression chamber in which said first and second substrates carried in by said conveying means can be carried without being exposed to the atmosphere while maintaining a decompressed state;
c:
baking means, arranged in said first decompression chamber, for bake processing said carried first and second substrates by heating said substrates;
d:
first getter giving means, arranged in said first decompression chamber or a second decompression chamber in which said first and second substrates can be carried from said first decompression chamber without being exposed to the atmosphere, having a getter precursor and getter activating means for activating said getter precursor;
e:
a third decompression chamber in which said first and second substrates can be carried from said first or second decompression chamber without being exposed to the atmosphere;
f:
substrate arranging means, arranged in said third decompression chamber, for arranging said first and said second substrates in positions opposite to each other by orienting said first and second members for an image displaying apparatus toward inside;
and
g:
sealing means, arranged in said third decompression chamber, for sealing said first and second substrates arranged in opposing positions by said substrate arranging means by heating said first and second substrates at predetermined temperature.

12 more elements

An apparatus for manufacturing an image displaying apparatus, comprising:

a:
a conveying means for conveying a first substrate provided with a first member for an image displaying apparatus and a second substrate provided with a second member for an image displaying apparatus;
b:
a first decompression chamber in which said first and second substrates carried in by the conveying means can be carried without being exposed to the atmosphere while maintaining a decompressed state;
c:
baking means, arranged in said first decompression chamber, for bake processing said carried first and second substrates by heating said substrates;
d:
first getter giving means, arranged in said first decompression chamber or a second decompression chamber in which said first and second substrates can be carried from said first decompression chamber without being exposed to the atmosphere, having a getter precursor and getter activating means for activating said getter precursor;
e:
a third decompression chamber in which said first and second substrates can be carried from said first or second decompression chamber without being exposed to the atmosphere;
f:
electron beam cleaning means, arranged in said third decompression chamber, for cleaning said first and said second substrates by irradiating electron beams to said first and second substrates;
g:
a fourth decompression chamber in which said first and second substrates can be carried from said third decompression chamber without being exposed to the atmosphere;
h:
second getter giving means, arranged in said fourth decompression chamber, having a getter precursor and getter activating means for activating said getter precursor;
i:
a fifth decompression chamber in which said first and second substrates can be carried from said fourth decompression chamber without being exposed to the atmosphere;
j:
substrate arranging means, arranged in said fifth decompression chamber, for arranging said first and second substrates in positions opposite to each other by orienting said first and second members for an image displaying apparatus toward inside;
and
k:
sealing means, arranged in said fifth decompression chamber, for sealing said first and second substrates arranged in opposing positions by said substrate arranging means by heating said first and second substrates at predetermined temperature.

20 more elements

Dependencies are inferred from the claim text.

Method and apparatus for manufacturing image displaying apparatus

Life of this patent

Method and apparatus for manufacturing image displaying apparatus

Life of this patent

Abstract

Claims109