Electronically controlled universal phase-shifting mask for stepper exposure method and system

A dynamic mask exposure system comprising:

• a support for a workpiece,
• a source of a beam of exposure radiation,
• a transmissive dynamic phase-shifting mask with orthogonally arranged matrices of actuator lines and binary pixel units which are opaque or transparent as a function of control inputs to the actuator lines, the transmissive dynamic mask having a top surface and a bottom surface,
• a control system connected to supply pixel control signals to the actuator lines of the transmissive dynamic mask to form a pattern of transparent regions and opaque regions,
• the beam directed down onto the top surface of the mask,
• an image detection element for detecting a pattern of radiation projected thereon located on the top surface of the support,
• the beam passing through the transparent regions and projecting a pattern from the mask onto the support where the image detection element is to be located, and
• means for providing signals representing the pattern to the control system.

A dynamic mask exposure method comprising:

• providing a support for a workpiece,
• providing a source of a beam of exposure radiation,
• providing a transmissive dynamic, phase-shifting mask with orthogonally arranged matrices of actuator lines and binary pixel units which are opaque or transparent as a function of control inputs to the actuator lines, the transmissive dynamic mask having a top surface and a bottom surface,
• supplying pixel control signals to the actuator lines of the transmissive dynamic mask to form a pattern of transparent regions and opaque regions,
• directing the beam down onto the top surface of the mask, and
• passing the beam through the transparent regions and projecting a pattern from the mask onto the support where the workpiece is to be located.

A dynamic mask exposure method comprising:

• providing a support for a workpiece,
• providing a source of a beam of exposure radiation,
• providing a transmissive dynamic phase-shifting mask with orthogonally arranged matrices of actuator lines and binary pixel units which are opaque or transparent as a function of control inputs to the actuator lines, the transmissive dynamic mask having a top surface and a bottom surface,
• supplying pixel control signals to the actuator lines of the transmissive dynamic mask to form a pattern of transparent regions and opaque regions,
• directing the beam down onto the top surface of the mask,
• locating an image detection element for detecting a pattern of radiation projected thereon located on the top surface of the support,
• passing the beam through the transparent regions and projecting a pattern from the mask onto the support where the image detection element is located, and
• providing signals representing the pattern to the control system from the image detection element.