Electrostatic printing of a metallic toner applied to solid phase crystallization and silicidation

A method for applying metallic toner onto an amorphous semiconductor layer with the objective or selective area crystallization, said method comprising the steps of:

• (a) charging a photo-sensitive surface;
• (b) exposing said photo-sensitive surface to an optical image or a digitally addressed beam to produce a latent image of charges on the photo-sensitive surface;
• (c) applying a toner to said photo-sensitive surface, said toner attracted to the charged areas of said photo-sensitive surface;
• (d) juxtaposing said photo-sensitive surface toned in step (c) to a layer of amorphous semiconductor and applying an electric field therebetween to cause said toner that is adherent to said photo-sensitive surface to migrate to said amorphous semiconductor layer;
• and
• (e) annealing said toned amorphous semiconductor layer to enable formation of polycrystalline semiconductor only in areas where said toner is adherent.

A method for the formation of silicide on a silicon surface comprising the steps of:

• (a) exposing a photo-sensitive surface to cause exposed areas of said surface to crosslink and exhibit an increase in resistivity in comparison with unexposed areas of said photo-sensitive surface;
• (b) charging said photo-sensitive surface, said exposed areas of said photo-sensitive surface retaining a charge longer than said unexposed areas;
• (c) applying a toner to said photo-sensitive surface, said toner attracted by retained charge on said exposed areas;
• (d) juxtaposing said photo-sensitive layer surface toned in step (c) to a silicon surface and applying an electric field therebetween to cause said toner that is adherent to said photo-sensitive surface to migrate to said silicon surface;
• and
• (e) annealing said toned silicon surface thereby enabling formation of silicide only in areas where said toner is adherent.

A method for the formation of silicide on a silicon surface comprising the steps of:

• (a) charging a photosensitive surface;
• (b) exposing said photosensitive surface to an optical image or a digitally addressed beam to produce a latent image of charges on the photosensitive surface;
• (c) applying a toner to said photosensitive surface, said toner attracted to the charged areas of said photosensitive surface;
• (d) juxtaposing said photo-sensitive layer surface toned in step (c) to a silicon surface and applying an electric field therebetween to cause said toner that is adherent to said photo-sensitive surface to migrate to said silicon surface;
• and
• (e) annealing said toned silicon surface thereby enabling formation of silicide only in areas where said toner is adherent.