Plasma enhanced chemical deposition of conjugated polymer
AssigneeBattelle Memorial Institute
InventorJohn D. Affinito
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Abstract
The method of the present invention has the steps of (a) flash evaporating a conjugated material in an evaporate outlet forming an evaporate; (b) passing the evaporate to a glow discharge electrode creating a glow discharge conjugated monomer plasma from the evaporate; and (c) cryocondensing the glow discharge conjugated monomer plasma on a substrate and crosslinking the glow discharge conjugated monomer plasma thereon, wherein the crosslinking results from radicals created in the glow discharge conjugated monomer plasma and achieves self curing.
Claims28
A method of making a conjugated polymer layer with plasma enhanced chemical vapor deposition of a conjugated material onto a substrate in a vacuum environment, comprising the steps of:
- (a) making an evaporate by receiving said conjugated material into a flash evaporation housing, evaporating said conjugated material on an evaporation surface, and discharging an evaporate through an evaporate outlet;
- (b) making a monomer plasma from said evaporate by passing said evaporate proximate a glow discharge electrode and creating a glow discharge for making said plasma from the evaporate;
- and
- (c) condensing said monomer plasma onto said substrate;
- wherein said conjugated material is a conjugated monomer or an unconjugated monomer with conjugated particles or said conjugated monomer with said conjugated particles.
A method for making conjugated polymer layers in a vacuum chamber, comprising:
- (a) flash evaporating a conjugated material forming an evaporate;
- (b) passing said evaporate to a glow discharge electrode creating a glow discharge conjugated monomer plasma from the evaporate;
- and
- (c) condensing said glow discharge conjugated monomer plasma on a substrate and crosslinking said glow discharge plasma thereon, said crosslinking resulting from radicals created in said glow discharge plasma for self curing.
Dependencies are inferred from the claim text.