Production of hydrophobic silica fine powder
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsYasuaki Nozawa, Kiyoshi Shirasuna, Masanori Akiyama, Hidekazu Uehara, Susumu Ueno
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Abstract
Hydrophobic silica fine powder is prepared by pyrolyzing a silane compound to give silica fine powder, then treating the silica fine powder with a hydrophobizing agent in a fluidization vessel containing at most 3 vol % of oxygen. The process effectively confers the pyrogenic silica with hydrophobicity.
Claims3
A process for producing hydrophobic silica fine powder, comprising the steps of pyrolyzing a silane compound to give a silica fine powder, and treating the silica fine powder with a hydrophobizing agent in a fluidization vessel containing at most 3 vol % of oxygen.
Dependencies are inferred from the claim text.