Fluorescent x-ray analyzing apparatus and secondary target device disposed therein

A fluorescent X-ray analyzing apparatus, comprising:

• a primary X-ray source for generating primary X-rays,
• a secondary target device for receiving the primary X-rays and providing fluorescent X-rays to a sample, said secondary target device including a target main body located near the primary X-ray source, and an X-ray blocking member disposed on a central axis linking between the primary X-ray source and the sample to prevent the primary X-rays from the primary X-ray source from being irradiated to the sample, said target main body including a plurality of target members having target surfaces facing the central axis and secondary target materials formed on the target surfaces, said plurality of target members being disposed concentrically with respect to the central axis to be spaced apart from each other, each of the target members having a length in a direction along the central axis and a disposition interval relative to a target member adjacent thereto to satisfy a first condition for allowing the primary X-rays to enter the target surface and a second condition for allowing the secondary X-rays generated at the target members by incidence of the primary X-rays to enter the sample, and
• an X-ray detector for detecting fluorescent X-rays generated from the sample.