Illumination optical system in exposure apparatus
AssigneeCanon Kabushiki Kaisha
InventorKen-ichiro Shinoda
Life of this patent
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Abstract
Disclosed is an illumination optical system including an optical integrator for forming a secondary light source by use of light from a light source, and a condenser optical system for condensing light from the optical integrator upon a surface to be illuminated, wherein the condenser optical system is arranged to change, independently of each other, an illuminance distribution and an angular distribution of the light incident on the surface illuminated.
Claims14
An illumination optical system including an optical integrator for forming a secondary light source by use of light from a light source, and a condenser optical system for condensing light from said optical integrator upon a surface to be illuminated, characterized in that said condenser optical system is arranged to change, independently of each other, an illuminance distribution and an angular distribution of the light incident on the surface illuminated.
An illumination optical system characterized by means for changing an illuminance distribution and an angular distribution of illumination light, independently of each other.
An exposure apparatus characterized by means for changing a telecentricity of exposure light and an intensity distribution thereof incident on a photosensitive substrate, independently of each other.
Dependencies are inferred from the claim text.