Integrated capacitor-like battery and associated method
AssigneeInegrated Power Solutions Inc.
InventorsMark Lynn Jenson, Jody Jon Klaassen, Jenn-Feng Yan
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Abstract
A method and system for fabricating solid-state energy-storage and energy-conversion devices including fabrication of films for devices without an anneal step, especially for the fabrication of supercapacitors and photovoltaic cells. A film is fabricated by depositing a first material layer to a location. Energy is supplied directly to the material forming the film. The energy can be in the form of energized ions of a second material. Supplying energy directly to the material and/or the film being deposited assists the growth of the crystalline structure of the film and controls stoichiometry.
Claims77
A supercapacitor, comprising:
- a substrate;
- a solid-state, electrode first film on the substrate;
- a solid-state, electrolyte second film on the first electrode film;
- and
- a solid-state, electrode second film on the electrolyte.
A method of fabricating a supercapacitor, comprising:
- providing a substrate;
- forming a solid-state first electrode film on the substrate;
- forming a solid-state electrolyte second film on the first electrode film, including:
- (a) depositing an electrolyte material to a location on the first electrode film, and
- (b) supplying energized ions of a second material adjacent the location to control growth of a structure of the electrode material at the location;
- and
- forming a solid-state second electrode third film.
The method of 22, wherein forming the solid-state, first electrode film includes:
- depositing an electrode material to a location on the substrate, and supplying energized ions of a second material adjacent the location to control growth of a crystalline structure of the electrode material at the location.
The method of 24, wherein depositing the electrode material includes depositing a metal oxide.
The method of 24, wherein depositing the electrode material includes depositing RuO2.
The method of 22, wherein forming the solid-state, electrode second film includes:
- depositing an electrode material to a location on the substrate, and supplying energized ions of a second material adjacent the location to control growth of a crystalline structure of the electrode material at the location.
The method of 27, wherein depositing the electrode material includes depositing a metal oxide.
The method of 27, wherein depositing the electrode material includes depositing RuO2.
A method of fabricating a photovoltaic device, comprising:
- providing a substrate;
- forming an electrode first film on the substrate;
- forming a semiconductor second film on the electrode first film;
- forming a semiconductor third film on the semiconductor second film;
- and
- forming an electrode fourth film on the semiconductor third, film wherein one of forming the second film and forming the third film includes:
- depositing semiconductor material using a deposition source;
- and
- supplying energy to the semiconductor material to deposit the semiconductor material into a desired film structure.
A photovoltaic cell, comprising:
- an essentially transparent substrate;
- an essentially transparent electrode first film on the substrate
- a semiconductor second film on the electrode first film;
- a semiconductor third film on the semiconductor second film;
- and
- an electrode fourth film on the semiconductor third film, wherein the third film includes a high quality first region adjacent to the second film and a highly doped second region remote from the second film, and the first region and the second film form a pn junction of the photovoltaic cell.
A system for fabricating photovoltaic cells, comprising:
- chamber in which a substrate on which the cell is to be formed,
- deposition apparatus connected to the chamber, the deposition apparatus directing material to be deposited toward the substrate, and
- means for providing energy to the material while the material is forming a film on the substrate.
A system for fabricating photovoltaic cells, comprising:
- a chamber in which a substrate on which the cell is to be formed,
- a deposition apparatus connected to the chamber, the deposition apparatus directing material to be deposited toward the substrate, and
- an energy source directing energy to the material while the material is forming a film on the substrate.
Dependencies are inferred from the claim text.