Micro-environment chamber and system for rinsing and drying a semiconductor workpiece
AssigneeSemitool, Inc.
InventorsGary L. Curtis, Raymon F. Thompson
Life of this patent
Estimating the term…
Abstract
In a method for rinsing and drying a semiconductor workpiece in a micro-environment, the workpiece is placed into a rinser/dryer housing. The rinser/dryer housing is rotated by a rotor motor. The rinser/dryer housing defines a substantially closed rinser/dryer chamber. Rinsing and drying fluids are distributed across at least one face of the semiconductor workpiece by the action of centrifugal force generated during rotation of the housing. A fluid supply system is connected to sequentially supply a rinsing fluid followed by a drying fluid to the chamber as the housing is rotated.
Claims23
A method for rinsing and drying a workpiece comprising:
- providing a rinser/dryer chamber around the workpiece;
- introducing a flow of rinsing fluid onto the workpiece;
- rotating the workpiece to generate centrifugal force to distribute the flow of rinsing fluid across at least one surface of the workpiece;
- providing a flow of drying fluid onto the workpiece after the rinsing fluid;
- and
- rotating the workpiece to generate centrifugal force to distribute the flow of drying fluid across the at least one surface of the workpiece.
A method for rinsing and drying a workpiece comprising:
- placing the workpiece onto a lower chamber member;
- moving at least one of an upper chamber member and the lower chamber member towards each other, to form a chamber enclosing the workpiece and generally conforming to the shape of the workpiece;
- supporting the workpiece within the chamber;
- introducing a flow of rinsing fluid onto the workpiece;
- rotating the workpiece to generate centrifugal force to distribute the flow of rinsing fluid across at least one surface of the workpiece;
- providing a flow of drying fluid onto the workpiece after the rinsing fluid;
- and rotating the workpiece to generate centrifugal force to distribute the flow of drying fluid across the at least one surface of the workpiece.
Dependencies are inferred from the claim text.