# US 2001/0022384 A1 · Resistive structure integrated in a semiconductor substrate

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- Number: US 2001/0022384 A1
- Document ID: US20010022384A1
- Status: Published application
- Kind: A1
- Application number: 09/747,425
- Filed: 2000-12-21
- Published: 2001-09-20
- Earliest claimed: 1999-12-21
- Inventors: Salvatore Leonardi; Roberto Modica
- Web page: https://patentgrep.com/patent/US20010022384A1

## CPC

- H10D 1/47: Resistors having no potential barriers
- H10D 84/209: {of only resistors}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES

## Abstract

A resistive structure integrated in a semiconductor substrate and having a suitably doped polysilicon region that is completely surrounded by a dielectric region so that the resistive structure is isolated electrically from other components jointly integrated in the semiconductor substrate.

## Claims

### Claim 1

A resistive structure, integrated in a semiconductor substrate, comprising a suitably doped polysilicon region completely surrounded by a dielectric region, so that the resistive structure is isolated electrically from other components jointly integrated in the semiconductor substrate.

### Claim 2 (depends on 1)

The resistive structure of claim 1, wherein portions of the resistive structure are formed with a plurality of trenches having suitable areas and are distributed about the polysilicon region to form a single dielectric region.

### Claim 3 (depends on 1)

The resistive structure of claim 1, wherein said polysilicon region and said dielectric region are winding patterns, thereby reducing the space requirements of the resistive structure for a given resistance value.

### Claim 4 (depends on 3)

The resistive structure of claim 3, wherein said winding patterns are formed to include rungs, said rungs are connected in parallel together by a metallization.

### Claim 5 (depends on 1)

The resistive structure of claim 1, wherein said polysilicon region is masked and then etched to create a T-shaped structure providing connection paths of polysilicon.

### Claim 6 (depends on 1)

The resistive structure of claim 1, wherein said polysilicon region comprises fill polysilicon that has been enhanced by implantation in its surface region only.

### Claim 7 (depends on 1)

The resistive structure of claim 1, wherein said polysilicon region comprises two deposited layers of undoped polysilicon, only a firs t of said layers being enhanced by implantation to lower the values of parasitic capacitances associated with the resistive structure.

### Claim 8 (depends on 7)

The resistive structure of claim 7, wherein said first polysilicon layer is enhanced by angled implantation and has a thickness dimension conforming to the sidewalls of the dielectric region to prevent said region from becoming filled completely.

### Claim 9 (depends on 1)

The resistive structure of claim 1, wherein said semiconductor substrate is a SOI substrate and comprises a plurality of dielectric trenches between wells of integrated devices therein, and that doped polysilicon intended to form the resistive structure is introduced into said trenches, the resistive structure itself requiring no additional integration area.

### Claim 10 (depends on 1)

The resistive structure of claim 1, wherein said dielectric region that is arranged to isolate the resistive structure is formed in the process of oxidizing the sidewalls of a dielectric trench.

### Claim 11

An integrated resistive structure, comprising:
at least one trench having sidewalls formed in a semiconductor substrate;
a dielectric layer entirely coating all walls of the at least one trench; and
a polysilicon region filling the at least one trench to be isolated dielectrically from the semiconductor substrate.

### Claim 12 (depends on 11)

The structure of claim 11, wherein the dielectric layer comprises a dielectric oxide formed from oxidizing the walls of the at least one trench.

### Claim 13 (depends on 12)

The structure of claim 12, wherein the dielectric layer has vertical and horizontal dimensions that are greater than vertical and horizontal dimensions of the polysilicon region.

### Claim 14 (depends on 11)

The structure of claim 11, wherein the polysilicon region has a T-shaped cross-sectional configuration with a stem portion filling the at least one trench and a cap portion covering the at least one trench and overlapping a portion of a top surface of the silicon substrate on each side of the at least one trench.

### Claim 15 (depends on 11)

The structure of claim 11, wherein the polysilicon region includes a doped surface region.

### Claim 16 (depends on 11)

The structure of claim 11, wherein the polysilicon region comprises first and second layers of polysilicon, the second layer being undoped and the first layer implanted with a dopant.

### Claim 17 (depends on 16)

The structure of claim 16, wherein the first layer of polysilicon is implanted by angled implantation and has a thickness dimension conforming to the walls of the dielectric-coated at least one trench to prevent complete filling of the at least one trench.

### Claim 18 (depends on 11)

The substrate of claim 11, comprising a plurality of trenches coupled together electrically by metallization.