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AssigneeNewport Corporation
InventorsPaul Bacchi, Paul S. Filipski
Estimating the term…
A self-teaching robot arm positioning method that compensates for support structure component alignment offset entails the use of a component emulating fixture preferably having mounting features that are matable to support structure mounting elements. Robot arm mechanism motor angular position data measured relative to component emulating fixture features are substituted into stored mathematical expressions representing robot arm vector motion to provide robot arm position output information. This information indicates whether the actual relative alignment between the robot arm mechanism and a semiconductor wafer carrier is offset from a nominal relative alignment. For manual correction, robot arm mechanism position output information provides the angular offset between the actual and nominal radial distances between the robot arm mechanism shoulder axis and two locating features of the component emulating fixture. Position coordinates for proper alignment by manual repositioning of any misaligned wafer carrier can then be derived. For automatic correction, robot arm mechanism position output information is used to derive a vector trajectory that causes the end effector of the robot arm mechanism to properly access the wafer stored in a misaligned wafer carrier.
In a specimen processing system that includes a robot arm mechanism in nominal alignment relative to a specimen holder positioned on a support surface of a support structure and having a clear area through which an end effector reaches to remove a specimen from or place a specimen in or on the specimen holder, the support surface of the support structure having mounting elements and the specimen holder having alignment surface features that are matable to the mounting elements, a method of determining an actual alignment of the robot arm mechanism relative to the specimen holder that differs from the nominal alignment to ensure that the end effector can remove specimens from and place specimens in the holder, comprising:
In a specimen processing system that includes a robot arm mechanism in nominal alignment relative to a specimen holder positioned on a support surface of a support structure and having a clear area through which an end effector reaches to remove a specimen from or place a specimen in or on the specimen holder, a method of determining an actual alignment of the robot arm mechanism relative to the specimen holder that differs from the nominal alignment to ensure that the end effector can remove specimens from and place specimens in the holder, comprising:
Dependencies are inferred from the claim text.