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AssigneeCanon Kabushiki Kaisha
InventorsMATSUOMI NISHIMURA, OSAMU IKEDA, SATOSHI OHTA, SHINZO UCHIYAMA
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The present invention provides a polishing apparatus comprising a holding means for holding a polished body with a polished surface thereof facing upwardly, and a polishing head for holding a polishing pad having a polishing surface having an area smaller than an area of the polished surface while contacting the polishing pad with the polished surface and for rotating the polishing pad around its rotation axis, and wherein the polishing head is provided with a drive means for revolving the polishing pad around a revolution axis, and the revolution axis and the rotation axis are positioned so that a distance between the revolution axis and the rotation axis becomes smaller than a radius of the polishing pad.
A polishing apparatus comprising:
A polishing method in which a polished body is rested on a holding means with a polished surface thereof facing upwardly and the polished surface is polished by rotating a polishing pad having a polishing surface having an area smaller than an area of the polished surface while contacting said polishing pad with the polished surface, comprising the steps of:
Dependencies are inferred from the claim text.