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AssigneeMicron Technology, Inc.
InventorsWerner Juengling, Kirk D. Prall, Ravi Iyer, Gurtej S. Sandhu, Guy Blalock
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The invention encompasses methods of forming insulating materials between conductive elements. In one aspect, the invention includes a method of forming a material adjacent a conductive electrical component comprising: a) partially vaporizing a mass to form a matrix adjacent the conductive electrical component, the matrix having at least one void within it. In another aspect, the invention includes a method of forming a material between a pair of conductive electrical components comprising the following steps: a) forming a pair of conductive electrical components within a mass and separated by an expanse of the mass; b) forming at least one support member within the expanse of the mass, the support member not comprising a conductive interconnect; and c) vaporizing the expanse of the mass to a degree effective to form at least one void between the support member and each of the pair of conductive electrical components. In another aspect, the invention includes an insulating material adjacent a conductive electrical component, the insulating material comprising a matrix and at least one void within the matrix. In another aspect, the invention includes an insulating region between a pair of conductive electrical components comprising: a) a support member between the conductive electrical components, the support member not comprising a conductive interconnect; and b) at least one void between the support member and each of the pair of conductive electrical components.
A method of forming a material adjacent a conductive electrical component comprising the following steps:
A method of forming a material adjacent a conductive electrical component comprising the following steps:
A method of forming a material adjacent a conductive electrical component comprising the following steps:
A method of forming a material adjacent a conductive electrical component comprising the following steps:
A method of forming an insulative spacer adjacent a conductive electrical component comprising the following steps:
A method of forming an insulative spacer adjacent a conductive electrical component comprising the following steps:
A method of forming a material between a pair of conductive electrical components comprising the following steps:
A method of forming a material between conductive electrical components comprising the following steps:
A method of forming a material between a pair of conductive electrical components comprising the following steps:
A method of forming a material between a pair of conductive electrical components comprising the following steps:
An insulating material adjacent a conductive electrical component, the insulating material comprising a matrix and at least one void within the matrix, wherein the matrix comprises a partially vaporized material.
An insulating material between a pair of conductive electrical components, the insulating material comprising a matrix and at least one void within the matrix, the matrix comprising a partially vaporized material.
An insulating region between a pair of conductive electrical components comprising:
An insulating region between a pair of conductive electrical components comprising:
Dependencies are inferred from the claim text.