Self aligned symmetric intrinsic process and device
AssigneeResearch Triangle Institute
InventorPaul Enquist
Life of this patent
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Abstract
A semiconductor device and method of fabricating the device. An emitter region is formed self centered and self aligned symmetrically with a base region. Using frontside processing techniques, a collector is formed symmetrically self-aligned with the base region and the emitter region. The collector region may be further formed self-centered with the base region using backside processing techniques. The self-aligned and self-centered symmetric structure virtually eliminates parasitic elements in the device significantly improving the device performance. The device is scalable on the order of approximately 0.1 microns. The method also provides reproduceability and repeatability of device characteristics necessary for commercial manufacture of the symmetric device.
Claims51
A method of fabricating a semiconductor device, comprising:
- forming an emitter region;
- forming a base region;
- and
- forming a collector region symmetrically self-aligned with said emitter region.
A method of fabricating a semiconductor device, comprising:
- forming a plurality of stacked layers;
- forming a first active region from one of said layers;
- forming a second active region separated from said first active region by a third active layer;
- and
- forming said first and second active regions to be symmetrically self-aligned.
A method of manufacturing a semiconductor device, comprising:
- forming a plurality of layers including a collector layer, a base layer and an emitter layer on a substrate;
- symmetrically self-aligning said collector layer, base layer and said emitter layer using processing on only one side of said substrate.
A semiconductor device, comprising:
- a first active region;
- a second active region;
- and
- a third active region disposed between said first and second active regions;
- said first and second active regions being symmetrically self-aligned.
Dependencies are inferred from the claim text.