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US 2001/0019694 A1Published application
Turbomolecular pump
AssigneePfeiffer Vacuum GmbH
InventorsArmin Blecker, Wolfgang Bremer, Peter Fahrenbach
Life of this patent
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Abstract
A turbomolecular pump including a plurality of rotor and stator discs alternatingly arranged with each other, a plurality of spacer rings for spacing the stator discs from each other, and at least one elastically deformable metallic member arranged between at least two spacer rings, with the stator discs, the spacer rings, and the elastically deformable metallic member forming together a stator stack.
Claims4
A turbomolecular pump, comprising a plurality of rotor discs and a plurality of stator discs, with separate rotor and stator discs being alternatingly arranged;
- a plurality of spacer rings for spacing the stator discs from each other;
- and at least one elastically deformable metallic member arranged between at least two spacer rings, wherein the stator discs, the spacer rings, and the elastically deformable metallic member form together a stator stack.
Dependencies are inferred from the claim text.