Multi-beam exposer unit
AssigneeKabushiki Kaisha Toshiba
InventorsTakashi Shiraishi, Masao Yamaguchi, Yasuyuki Fukutome
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AssigneeKabushiki Kaisha Toshiba
InventorsTakashi Shiraishi, Masao Yamaguchi, Yasuyuki Fukutome
Estimating the term…
A multi-beam exposer unit 1 includes 1 ∑ i = 1 M ( Ni - 1 ) half mirror 11 for synthesizing 2 ∑ i = 1 M Ni light to M groups of light beams, M sets of optical members 12, having positive power with a large absolute value as compared with a case of a main scanning direction, for further converging the beam in a sub-scanning direction, a synthesizing reflection mirror 13 for reflecting M groups of beams to be substantially overlaid on each other in a first direction, a polygon mirror unit 5 for deflecting M groups of beams, and a dust prevention glass 14 inclined to a direction opposite to a direction where the half mirror is inclined, thereby reducing influence of coma aberration exerted on M groups of beams by the half mirror.
A multi-beam exposer unit comprising:
A multi-beam exposer unit comprising:
A multi-beam exposer unit comprising:
A multi-beam exposer unit comprising:
A multi-beam exposer unit comprising:
Dependencies are inferred from the claim text.