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AssigneeNEC Corporation
InventorsAKINOBU SHIBUYA, KOJI MATSUI
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A thin-film resistor that enables a pattern to be simply formed by means of wet etching, that has an excellent resistance temperature characteristic, and that can be easily manufactured, and a method for manufacturing this thin-film resistor, as well as a wiring substrate with this thin-film resistor formed therein. A thin resistor film according to this invention has a structure in which crystal grains deposit in the matrix of amorphous titanium nitride. The thin resistor film is formed on a substrate. The crystal grains includes at least one of crystal titanium nitride and crystal titanium. The thin resistor film can be manufactured using a simple process and can provide a wide range of resistance values with a small tolerance and a temperature coefficient of resistance close to zero.
A thin-film resistor comprising a composite of at least either crystal titanium nitride or crystal titanium and amorphous titanium nitride.
A wiring substrate having a wiring provided on an insulator wherein;
A wiring substrate having a structure in which a wiring is connectively provided on an insulator via a resistor, wherein;
A method for manufacturing a wiring substrate comprising the steps of:
A method for manufacturing a wiring substrate comprising the steps of:
Dependencies are inferred from the claim text.