Apparatus for growing a semiconductor crystal and method of growing the same
AssigneeNEC Corporation
InventorsMasahito Watanabe, Minoru Eguchi
Life of this patent
Estimating the term…
Abstract
In an apparatus for growing a semiconductor crystal from semiconductor melt, a crucible retains the semiconductor melt. An electrode contacts with the semiconductor melt and applies current to the semiconductor melt. The electrode is formed by the same material as the semiconductor crystal.
Claims28
An apparatus for growing a semiconductor crystal from semiconductor melt, comprising:
- a crucible which retains said semiconductor melt;
- and
- an electrode which contacts with said semiconductor melt and which applies at least current to said semiconductor melt;
- said electrode being formed by the same material as said semiconductor crystal.
An apparatus for growing a semiconductor crystal from semiconductor melt having a principal surface, comprising:
- a crucible which retains said semiconductor melt;
- an electrode which applies at least current to said semiconductor melt;
- a partial electrode portion which contacts with the principal surface
- said partial electrode portion being formed by the same material as said semiconductor crystal.
An apparatus for growing a semiconductor crystal from semiconductor melt having a principal surface, comprising:
- a crucible which retains said semiconductor melt;
- and
- an electrode which applies at least current to said semiconductor melt;
- and
- said electrode contacting with said semiconductor melt at a higher position than the principal surface.
A method of growing a semiconductor crystal from semiconductor melt having a principal surface, comprising the steps of:
- retaining said semiconductor melt in a crucible;
- contacting an electrode with said semiconductor melt at a higher position than the principal surface;
- applying at least current to said semiconductor melt via said electrode;
- and
- pulling up said semiconductor crystal from said semiconductor melt via a seed crystal on the condition that the current is applied to said semiconductor melt and said semiconductor melt is rotated;
- said electrode being formed by the same material as said semiconductor crystal.
Dependencies are inferred from the claim text.