Preventive maintenance apparatus for CMP top-ring's backing-film and the method thereof
AssigneeWinbond Electronics Corp.
InventorsTing-kou Chen, Yong-Sen Liao, Frank J.C. Chang
Life of this patent
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Abstract
A preventive maintenance method and apparatus for quickly and precisely replacing a backing-film of a CMP machine is provided. In comparison with a conventional backing-film, the backing-film according to the present invention is pre-drilled by laser in order to bypass the restriction set by a conventional manual drilling process on the backing-film. In addition, a PM apparatus for the backing-film comprises an aligning panel having a plural first pins in order to quickly check whether drilled holes of the backing-film are aligned with the corresponding air holes or not. Therefore, the CMP machine down time due to the PM can be reduced.
Claims11
A preventive maintenance method for a backing-film of a CMP machine, comprising the steps of:
- (a) providing the CMP machine having a shaft and a detachable top-ring disposed on the shaft, wherein the top-ring is provided with plural air holes, a detachable guide-ring, and a replaceable backing-film, and wherein the backing-film is pre-drilled by laser to produce plural through holes that corresponds to the air holes;
- (b) disassembling the top-ring from the shaft before the preventive maintenance for the backing-film is proceeded;
- (c) cleaning the top-ring after disassembling the guide-ring from the top-ring and removing the used backing-film;
- (d) providing an aligning panel having plural first pins and plural first pinholes at layout positions corresponding to the air holes of the top-ring, wherein each of the first pins are disposed inside each of the corresponding first pinholes respectively;
- (e) aligning a new backing-film with the aligning panel and then inserting each of the first pins through each of the corresponding through holes of the backing-film;
- (f) putting the new backing-film on the top-ring along with the aligning panel and inserting each of the first pins through each of the corresponding air holes;
- (g) adhering the new backing-film onto the top-ring and then removing the aligning panel;
- and
- (h) assembling the top-ring to the shaft after assembling the guide-ring to the top-ring.
A preventive maintenance apparatus for a backing-film of a CMP machine having a top-ring with plural air holes, comprising:
- an aligning panel provided with plural first pinholes at layout positions that corresponds to the air holes;
- and
- a plurality of first pins each disposed inside the respective first pinhole.
Dependencies are inferred from the claim text.