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AssigneeTDK Corporation
InventorsHiroshi Shindou, Masahiro Sasaki, Akio Ogawa, Tetsuo Abe, Masaki Kouzu, Masao Yamaguchi
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When electric elements are formed on a ceramic bar or the like, the positional displacement of the respective elements occurs due to a division exposing process or the like. An object of the present invention is to provide a device and a method which unify the non-polished portion of the respective elements by conducting polishing while a complicated deformation or the like is given to the ceramic bar. To achieve this object, the ceramic bar or like is held by using a jig, and a plurality of loads are applied to portions of the jig where the ceramic bar or the like is held, to thereby deform the ceramic bar or the like and polish the element in that state. In this situation the load applied points are disposed so as to avoid the boundaries of the division exposure.
A polishing device for polishing an object to be polished which is elongated in one direction, in which a plane of the object to be polished extending in the longitudinal direction is divided into a plurality of regions, and a plurality of elements each consisting of at least one of an electromagnetic conversion element and a magnetroelectric conversion element are formed in the longitudinal direction in each of the divided regions, said polishing device comprising:
A polishing device for polishing an object to be polished which is elongated in one direction, in which a plurality of elements each consisting of at least one of an electromagnetic conversion element and a magnetroelectric conversion element are formed in the longitudinal direction on a plane that extends in the longitudinal direction, said polishing device comprising:
A polishing method of an object to be polished which is elongated in one direction, in which a plane of the object to be polished extending in the longitudinal direction is divided into a plurality of regions, and a plurality of elements each consisting of at least one of an electromagnetic conversion element and a magnetroelectric conversion element are formed in the longitudinal direction in each of the divided regions, said polishing method comprising:
A polishing method of an object to be polished which is elongated in one direction, in which a plurality of elements each consisting of at least one of an electromagnetic conversion element and a magnetroelectric conversion element are formed in the longitudinal direction on a plane that extends in the longitudinal direction, said polishing method comprising:
Dependencies are inferred from the claim text.