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US 2001/0018162 A1Published application
Novel polymers, chemical amplification resist compositions and patterning process
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsJun Hatakeyama, Jun Watanabe, Yuji Harada
Life of this patent
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Abstract
Polymers comprising recurring units of an acrylic derivative of fluorinated backbone represented by formula (1) are novel. 1 R1, R2 and R3 are independently H, F, C1-20 alkyl or fluorinated C1-20 alkyl, at least one of R1, R2 and R3 contains fluorine, and R4 is a hydrophilic group. Using the polymers, chemical amplification positive resist compositions featuring low absorption of F2 excimer laser light are obtained.
Claims8
A polymer comprising recurring units of an acrylic derivative having a fluorinated backbone represented by the general formula (1):
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- wherein R1, R2 and R3 are independently hydrogen, fluorine or unsubstituted or fluorinated, straight, branched or cyclic alkyl groups of 1 to 20 carbon atoms, at least one of R1, R2 and R3 contains fluorine, and R4 is a hydrophilic group.
A polymer comprising
- recurring units of an acrylic derivative having a fluorinated backbone represented by the general formula (1):
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- wherein R1, R2 and R3 are independently hydrogen, fluorine or unsubstituted or fluorinated, straight, branched or cyclic alkyl groups of 1 to 20 carbon atoms, at least one of R1, R2 and R3 contains fluorine, and R4 is a hydrophilic group, and
- recurring units represented by the general formula (2):
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- wherein R5, R6 and R7 are independently hydrogen, fluorine or unsubstituted or fluorinated, straight, branched or cyclic alkyl groups of 1 to 20 carbon atoms, and R8 is an acid labile group.
3 more elements
A polymer comprising
- recurring units of an acrylic derivative having a fluorinated backbone represented by the general formula (1):
- 28
- wherein R1, R2 and R3 are independently hydrogen, fluorine or unsubstituted or fluorinated, straight, branched or cyclic alkyl groups of 1 to 20 carbon atoms, at least one of R1, R2 and R3 contains fluorine, and R4 is a hydrophilic group,
- recurring units represented by the general formula (2):
- 29
- wherein R5, R6 and R7 are independently hydrogen, fluorine or unsubstituted or fluorinated, straight, branched or cyclic alkyl groups of 1 to 20 carbon atoms, and R8 is an acid labile group, and
- recurring units represented by the general formula (3):
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- wherein R9, R10 and R11 are independently hydrogen, fluorine or unsubstituted or fluorinated, straight, branched or cyclic alkyl groups of 1 to 20 carbon atoms, and R12 is an acid stable group.
6 more elements
Dependencies are inferred from the claim text.