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US 2001/0018037 A1Published application
Silicon oxide containing active silicon and its evaluation
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsHirofumi Fukuoka, Mikio Aramata, Kazutoshi Fujioka, Susumu Ueno, Takeshi Fukuda
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Abstract
Silicon oxide containing active silicon represented by the general formula: SiOx wherein x is from 0.8 to 1.9, when analyzed by solid state NMR (29Si DD/MAS) with a sufficient relaxation time set, exhibits a spectrum having two separate peaks, a broad peak (A1) centered at −70 ppm and a broad peak (A2) centered at −110 ppm, the area ratio A1/A2 being in the range of 0.1≦A1/A2≦1.0.
Claims6
Silicon oxide containing active silicon represented by the general formula:
- SiOx wherein x is from 0.8 to 1.9 which on analysis by solid state NMR (29Si DD/MAS) with a sufficient relaxation time set, exhibits a spectrum having two separate peaks, a broad peak (A1) centered at −70 ppm and a broad peak (A2) centered at −110 ppm, the area ratio A1/A2 being in the range of 0.1≦A1/A2≦1.0.
A method for evaluating silicon oxide, comprising the steps of:
- analyzing silicon oxide by solid state NMR (29Si DD/MAS) with a sufficient relaxation time set, and
- judging the silicon oxide to be silicon oxide containing active silicon when the measured spectrum has a broad peak (A1) centered at −70 ppm and a broad peak (A2) centered at −110 ppm, the area ratio A1/A2 being in the range of 0.1≦A1/A2≦1.0.
Dependencies are inferred from the claim text.