Display device using thin film cathode and its process
AssigneeHitachi, Ltd.
InventorsToshiaki Kusunoki, Mutsumi Suzuki, Masakazu Sagawa
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Abstract
Disclosed is a display device with improved brightness achieved by increasing electron emission efficiency of a thin film cathode. Phosphors are irradiated with electrons emitted to a vacuum through a flat thin film which is thinner than 5 nm and is disposed so as to face the phosphors. A top electrode for emitting the electrons is formed by stacking thin films of Ir, Pt, and Au, and performing a heat treatment so as to reconstruct the top electrode to have a structure in which thick island parts and a flat thin film part mixedly exist.
Claims19
A display device using a thin film cathode, comprising:
- a top electrode disposed over a base electrode, said top electrode having a flat thin film part for emitting electrons and a plurality of island parts;
- a bus electrode connected to said flat thin film part in said top electrode;
- and
- a phosphor disposed over said top electrode and said bus electrode so as to face each other,
- wherein by applying a voltage across said base electrode and said bus electrode, said phosphor is irradiated with the electrons emitted from said flat thin film part.
A display device using a thin film cathode comprising a base electrode, a top electrode, and an insulating layer, a semiconductor layer, a porous semiconductor layer, or a mixture film or stacked film of the layers, which is sandwiched by the top and base electrodes, by application of a voltage across the base electrode and the top electrode, for emitting electrons from the top electrode side into pressure-reduced atmosphere and irradiating a phosphor disposed on the opposite side with the emitted electrons,
- wherein said top electrode has a structure in which a plurality of island parts made of at least two kinds of elements and a common flat thin film part having an area larger than the island parts and emitting said electrons mixedly exist.
A process of fabricating a display device using a thin film cathode in which a top electrode is provided over a base electrode, a phosphor is disposed above said top electrode so as to face said top electrode, and pressure-reduced atmosphere is air-tightly kept in a space between said top electrode and said phosphor,
- wherein said top electrode is formed by providing a thin metal film on said base electrode, partially cohering a metal in the thin metal film to thereby form an island part in the thin metal film, and performing a heat treatment to make a flat part as the rest part thinner than initial thickness of the thin metal film.
Dependencies are inferred from the claim text.