Fluid heating apparatus
AssigneeOmron Corporation and Dainippon Screen Mfg. Co.,
InventorsMasakazu Katayama, Seiji Oku, Tomonori Kojimaru, Yusuke Muraoka
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Abstract
A fluid heating apparatus is provided which comprises a heat-generating bent tube formed of an electrically conductive material in a tubular configuration and having opposite ends connected in communication to piping through which fluid to be heated is passed, a coil provided outside the heat-generating bent tube and wound to surround the heat-generating bent tube, and a power supply unit for feeding a high-frequency current through the coil. The fluid heating apparatus suppresses the generation of particles in the path of the fluid and may be used to heat gas or liquid in an apparatus for processing semiconductor substrates and flat panel substrates.
Claims8
A fluid heating apparatus interposed in piping through which fluid to be heated is passed for heating the fluid by using electromagnetic induction, said fluid heating apparatus comprising:
- a heat-generating bent tube formed of an electrically conductive material in a tubular configuration and having opposite ends connected in communication to said piping through which the fluid is passed;
- a coil provided outside said heat-generating bent tube and wound to surround said heat-generating bent tube;
- and
- a power supply unit for feeding a high-frequency current through said coil.
Dependencies are inferred from the claim text.