Apparatus for coating substrates
OwnerJohn Michael Walls, Alaric Graham Spencer +2inventors
InventorsJohn Michael Walls, Alaric Graham Spencer, Norman Henry White, Alan Robert Waugh
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Abstract
The invention relates to the deposition of material onto surfaces of a substrate, typically respective concave and convex surfaces and provides a system whereby the substrates are held in a mutually sealed relationship by a carrier during the deposition of material onto respective surfaces thereby preventing or minimising the problem of lack of adhesion of the material on the surfaces
Claims19
Apparatus for applying a coating to concave and convex surfaces of at least one substrate, said apparatus including a vacuum chamber housing, at least one set of material deposition means and a means for transporting at least one substrate and carrier for the same, the deposition means in the set being spaced apart in the chamber and facing each other to deposit material simultaneously or sequentially by magnetron sputtering material onto opposing surfaces of the at least one substrate which is supported by the carrier between the same, and the substrate and carrier are movable to a position between the deposition means in the set and characterized in that the convex and concave surfaces are sealed from each other by contact of the carrier with the substrate in order to avoid cross contamination of deposited material between respective concave and convex surfaces and thereby optimise adhesion of the deposited material on the respective surfaces.
Apparatus for applying a coating to first and second surfaces of at least one substrate having concave and convex surfaces to be coated, said apparatus including a vacuum chamber housing at least one material deposition means for the application of material onto a surface of the substrate using magnetron sputter deposition techniques, and a carrier for the substrate wherein the deposition means face the at least one substrate and the at least one substrate is rotatable about an axis of the same such that a single deposition means can deposit material onto both the first and second surfaces of the substrate.
Dependencies are inferred from the claim text.