Processing device and method of processing material with ultraviolet light or light of shorter wavelength than ultraviolet light

A processing method of processing a material by irradiating said material with ultraviolet light or light of a shorter wavelength than the ultraviolet light to remove said material, or to change physical or chemical properties of said material, comprising the steps of:

• emitting the ultraviolet light or the light of the shorter wavelength than the ultraviolet light to an irradiation region of a predetermined configuration;
• entering a processing configuration formed of a position on a plane of said material and a processing amount;
• converting the entered processing configuration into an effective exposure amount distribution formed of the position on said material plane and the exposure amount in accordance with a relationship between the exposure amount of said material and said processing amount;
• calculating a movement pattern for moving on said material plane said irradiation region based on said effective exposure amount distribution and the configuration of said irradiation region such that the exposure amount distribution of said material forms said effective exposure amount distribution;
• and
• moving said irradiation region and said material relatively to each other in accordance with the calculated movement pattern.

A processing device of processing a material by irradiating said material with ultraviolet light or light of a shorter wavelength than the ultraviolet light to remove said material, or to change physical or chemical properties of said material, comprising:

• a light source for emitting the ultraviolet light or the light of the shorter wavelength than the ultraviolet light;
• a mask having a transparent portion of a predetermined configuration for passing the light emitted from said light source;
• a moving mechanism for moving said mask and said material relatively to each other in accordance with a movement pattern determined based on a processing configuration of said material;
• and
• an oscillating mechanism for oscillating said mask and said material relatively to each other for oscillating a region for irradiation of said material with the light passed through said transparent portion, wherein
• a speed of the oscillation by said oscillating mechanism is higher than a speed of movement by said moving mechanism.

A processing device of processing a material by irradiating said material with ultraviolet light or light of a wavelength shorter than the ultraviolet light to remove said material, or to change physical or chemical properties of said material, computing:

• a light source for emitting the ultraviolet light or the light of the shorter wavelength than the ultraviolet light;
• a mask having a plurality of transparent portions for passing the light emitted from said light source;
• and
• an oscillating mechanism for oscillating said mask and said material relatively to each other for oscillating a plurality of regions for irradiation of said material with the light passed through said plurality of transparent portions, wherein
• said plurality of transparent portions include the transparent portion occupying a unit area at a rate different from those of the other transparent portions.

A processing method of processing a material by irradiating said material with ultraviolet light or light of a shorter wavelength than the ultraviolet light to remove said material, or to change physical or chemical properties of said material, comprising the steps of;

• emitting the ultraviolet light or the light of the shorter wavelength than the ultraviolet light to an irradiation region of a predetermined configuration;
• moving said irradiation region and said material relatively to each other in accordance with a movement pattern determined based on the processing configuration of said material;
• and
• oscillating said irradiation region and said material relatively to each other for oscillating said irradiation region on a plane of said material, wherein a speed of the oscillation in said oscillating step is higher than a speed of the movement in said moving step.

A processing method of processing a material by irradiating said material with ultraviolet light or light of a shorter wavelength than the ultraviolet light to remove said material, or to change physical or chemical properties of said material, comprising the steps of;

• emitting the ultraviolet light or the light of the shorter wavelength than the ultraviolet light to a plurality of irradiation regions;
• and
• oscillating said plurality of irradiation regions and said material relatively to each other for oscillating said plurality of irradiation regions on a plane of said material, wherein
• said plurality of irradiation regions include the irradiation region occupying a unit area at a rate different from those of the other irradiation regions.