Perfluoro compounds decomposition method and decomposition apparatus therefor
OwnerManabu Hiraoka, Hideji Kawanaka +2inventors
InventorsManabu Hiraoka, Hideji Kawanaka, Yoshihiro Ibaraki, Shinichi Ando
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Abstract
A decomposition method for effectively decomposing PFC at a low temperature and in safety by use of a chemically and intensively more stable reactant, a reactant for use therein and a decomposition apparatus therefor are provided. A perfluoro compounds decomposition method which comprises bringing a gas containing perfluoro compounds under heating into contact with a solid reactant, thereby fixing the fluorine component on said reactant, is characterized in that said reactant contains an alkaline earth metal compound and aluminum oxide.
Claims4
A perfluoro compounds decomposition method which comprises bringing a gas containing perfluoro compounds under heating into contact with a solid reactant, thereby fixing the fluorine component on said reactant, characterized in that said reactant contains an alkaline earth metal compound and aluminum oxide.
A reactant for decomposition of perfluoro compounds, which contains an alkaline earth metal compound and aluminum oxide.
Dependencies are inferred from the claim text.