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US 2001/0012481 A1Published application
Wafer handling system
AssigneeSemitool, Inc.
InventorJeffry Davis
Life of this patent
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Abstract
A semiconductor wafer processing system has a carrier including wafer slots. A process robot engages the carrier and installs the carrier into a rotor within a process chamber. The rotor has a tapered or stepped inside surface matching a tapered or stepped outside surface of the carrier . Wafer retainers on the carrier pivot to better secure wafers within the carrier.
Claims23
A processing system comprising:
- a carrier having a tapered outer surface and a plurality of wafer slots;
- a centrifugal processor including a rotor having an inner surface with a taper substantially matching the taper of the carrier;
- and
- a robot for installing and removing the carrier into and out of the rotor.
1 more element
A method for processing wafers, comprising:
- loading wafers in a horizontal orientation into a carrier;
- lifting the carrier and reorienting the carrier so that the wafers are within 30 degrees of vertical;
- and
- placing the carrier into a rotor in a process chamber.
1 more element
A processing system comprising:
- a carrier having a plurality of stepped outer surfaces and a plurality of wafer slots for holding wafers;
- a centrifugal processor including a rotor having a plurality of stepped inner surfaces;
- a robot for installing and removing the carrier into and out of the rotor;
- with the stepped inner surfaces of the rotor engaging the stepped outer surfaces of the carrier, when the carrier is installed in the rotor.
1 more element
Dependencies are inferred from the claim text.