Metal buckling beam probe

A buckling beam probe assembly for electrically connecting to a test apparatus [with contact pads on the surface of a device to be tested], the assembly comprising:

• a plurality of buckling beam wires each having a head, a body, and a tail and being pressed vertically onto the contact pads and buckling laterally to adapt to height differences of the contact pads caused by irregularities on the surface of the device to be tested;
• a top plate having a first plurality of apertures receiving the heads of the plurality of buckling beam wires;
• a bottom plate having a second plurality of apertures receiving the tails of the plurality of buckling beam wires;
• and
• a plurality of intermediate metal sections being positioned between the top plate and the bottom plate and having a plurality of openings, the openings being coated with an insulation layer and receiving the bodies of the plurality of buckling beam wires.

A buckling beam probe assembly for electrically connecting to a test apparatus [with contact pads on the surface of a device to be tested], the assembly comprising:

• a plurality of buckling beam wires each having a head loosely connected to the test apparatus, a body, and a tail connected to the contact pads and being pressed vertically onto the contact pads and buckling laterally to adapt to height differences of the contact pads caused by irregularities on the surface of the device to be tested;
• a top plate being formed of multiple thin metal layers and having a first plurality of apertures, the first plurality of apertures receiving the heads of the plurality of buckling beam wires and being coated with an insulation layer;
• a bottom plate being formed of multiple thin metal layers and having a second plurality of apertures, the second plurality of apertures receiving the tails of the plurality of buckling beam wires and being coated with the insulation layer;
• and
• a plurality of intermediate metal sections being formed of multiple thin metal layers positioned between the top plate and the bottom plate and having a plurality of openings, the openings being coated with the insulation layer and receiving the bodies of the plurality of buckling beam wires.