Trace-level gas analysis apparatus and method
AssigneeNEC Corporation
InventorYuuichi Satou
Life of this patent
Estimating the term…
Abstract
A trace-level gas analysis apparatus having a diffusion scrubber 11 that captures atmospheric gas components and a sampling tube 10 that guides air into the diffusion scrubber 11 is provided with the cleaning means 2 for cleaning the diffusion scrubber 11 and the sampling tube 10, using a cleaning fluid 22.
Claims7
A trace-level gas analysis apparatus comprising:
- a diffusion scrubber for capturing an atmospheric gas component;
- a sampling tube for guiding said captured atmospheric gas component to said diffusion scrubber;
- and
- cleaning means for cleaning said diffusion scrubber and said sampling tube using a cleaning fluid.
A method for analyzing trace-level gas components of the air, in which said air is guided to a diffusion scrubber via a sampling tube, an absorption fluid is introduced into said diffusion scrubber, said absorption fluid being concentrated by a concentration column of an ion chromatograph, thereby separating and analyzing the atmospheric trace-level gas components, said method comprising the steps of:
- cleaning said diffusion scrubber and said sampling tube;
- reclaiming said cleaning fluid used in said first step;
- causing an absorption fluid to circulate within said diffusion scrubber so as to stabilize capturing in said diffusion scrubber;
- causing an absorption fluid to circulate between said diffusion scrubber and said concentration column, so as to concentrate said trace-level gas components in said concentration column;
- and
- analyzing components concentrated in said concentration column using an ion chromatograph.
Dependencies are inferred from the claim text.