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US 2001/0010973 A1Published application
Method for producing a structure with narrow pores
AssigneeCanon Kabushiki Kaisha
InventorsToshiaki Aiba, Hidetoshi Nojiri, Taiko Motoi, Tohru Den, Tatsuya Iwasaki
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Abstract
Provided is a method for producing regularly ordered narrow pores excellent in linearity, and a structure with such narrow pores. A method for producing a narrow pore comprises a step of radiating a particle beam onto a workpiece, and a step of carrying out anodic oxidation of the workpiece having been irradiated with the particle beam, to form a narrow pore in the workpiece.
Claims18
A method for producing a narrow pore, said method comprising:
- a step of radiating a particle beam onto a workpiece;
- and
- a step of carrying out anodic oxidation of the workpiece having been irradiated with the particle beam, to form a narrow pore in the workpiece.
Dependencies are inferred from the claim text.