# US 12,772,722 B2 · Display apparatus and, apparatus and method of manufacturing the same

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- Number: US 12,772,722 B2
- Document ID: US12772722B2
- Status: Granted
- Kind: B2
- Application number: 18/122,451
- Filed: 2023-03-16
- Published: 2023-07-13
- Granted: 2026-10-20
- Earliest claimed: 2018-07-27
- Assignees: Samsung Display Co., Ltd.
- Applicants: Samsung Display Co., Ltd.
- Inventors: Jaesuk Dustin Moon; Sangshin Lee; Seungjin Lee; Eunjoung Jung
- Web page: https://patentgrep.com/patent/US12772722B2

## CPC

- H10K 71/166: {using selective deposition, e.g. using a mask}
- C23C 14/042: {using masks}
- H10K 59/12: Active-matrix OLED [AMOLED] displays
- H10K 59/121: characterised by the geometry or disposition of pixel elements
- H10K 59/122: Pixel-defining structures or layers, e.g. banks
- H10K 59/873: {Encapsulations}
- H10K 71/164: {using vacuum deposition}
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)

## Abstract

One or more embodiments include a display apparatus including an opening, an apparatus for manufacturing the display apparatus, and a method of manufacturing the display apparatus capable of reducing generation of gas or foreign matter.

## Claims

### Claim 1

An apparatus for manufacturing a display apparatus, the apparatus comprising:
a chamber;
a source portion arranged in the chamber and configured to supply a deposition material into the chamber;
a first mask configured to be arranged in the chamber and comprising a first opening, through which the deposition material is configured to pass; and
a second mask configured to be selectively arranged in the chamber to be replaceable with the first mask, the second mask comprising a second opening, through which the deposition material is configured to pass,
wherein the first mask comprises a first protrusion protruding towards an inner portion of the first opening and configured to block the deposition material,
wherein a portion of an inner surface of the first opening adjacent to the first protrusion has a concavo-convex shape comprising a plurality of protrusions and a plurality of recesses alternately arranged,
wherein the second mask comprises a second protrusion protruding towards an inner portion of the second opening and configured to block the deposition material, and
wherein a portion of an inner surface of the second opening adjacent to the second protrusion has the concavo-convex shape comprising a plurality of protrusions and a plurality of recesses alternately arranged, a largest protrusion of the protrusions of the second mask having a width that is twice a thickness of the second mask or less.

### Claim 2 (depends on 1)

The apparatus of claim 1, wherein at least one of the first mask and the second mask is configured to be arranged sequentially in the chamber.

### Claim 3 (depends on 1)

The apparatus of claim 1, wherein a width of a largest protrusion of the first mask is a distance between a starting point of the largest protrusion of the first mask to a point that is furthest from the starting point.

### Claim 4 (depends on 3)

The apparatus of claim 3, wherein the width of the largest protrusion of the second mask is a distance between a starting point of the largest protrusion of the second mask to a point that is furthest from the starting point of the largest protrusion of the second mask.

### Claim 5 (depends on 1)

The apparatus of claim 1, wherein two or more of the protrusions of the first mask are different from one another, the concavo-convex shape of the first mask being atypical.

### Claim 6 (depends on 5)

The apparatus of claim 5, wherein two or more of the protrusions of the second mask are different from one another, the concavo-convex shape of the second mask being atypical.

### Claim 7

An apparatus for manufacturing a display apparatus, the apparatus comprising:
a chamber;
a display substrate of the display apparatus arranged in the chamber, the display substrate comprising a first deposition area, and a second deposition area;
a source portion arranged in the chamber and configured to supply a deposition material into the chamber;
a first mask configured to be arranged in the chamber and comprising a first opening, through which the deposition material is configured to pass,
wherein the first mask comprises a first protrusion protruding towards an inner portion of the first opening and configured to block the deposition material,
wherein a portion of an inner surface of the first opening adjacent to the first protrusion has a concavo-convex shape comprising a plurality of protrusions and a plurality of recesses alternately arranged, a largest protrusion of the protrusions having a width that is twice a thickness of the first mask or less; and
a second mask configured to be selectively arranged in the chamber to be replaceable with the first mask, the second mask comprising a second opening, through which the deposition material is configured to pass,
wherein the second mask comprises a second protrusion protruding towards an inner portion of the second opening and configured to block the deposition material,
wherein a portion of an inner surface of the second opening adjacent to the second protrusion has the concavo-convex shape comprising a plurality of protrusions and a plurality of recesses alternately arranged, a largest protrusion of the protrusions of the second mask having a width that is twice a thickness of the second mask or less,
wherein the deposition material is configured to pass through the first opening to be deposited on a part of the display substrate to form the first deposition area and is configured to pass through the second opening to be deposited on a different part of the display substrate to form the second deposition area and different from the first deposition area,
wherein the first deposition area and the second deposition area are connected to each other to form one display area on the display substrate, and
wherein the first deposition area and the second deposition area at least partially overlap with each other.

### Claim 8 (depends on 7)

The apparatus of claim 7, wherein the width of the largest protrusion of the first mask is a distance between a starting point of the largest protrusion of the first mask to a point that is furthest from the starting point.

### Claim 9 (depends on 8)

The apparatus of claim 8, wherein the width of the largest protrusion of the second mask is a distance between a starting point of the largest protrusion of the second mask to a point that is furthest from the starting point of the largest protrusion of the second mask.

### Claim 10 (depends on 7)

The apparatus of claim 7, wherein two or more of the protrusions of the first mask are different from one another, the concavo-convex shape of the first mask being atypical.

### Claim 11 (depends on 10)

The apparatus of claim 10, wherein two or more of the protrusions of the second mask are different from one another, the concavo-convex shape of the second mask being atypical.

### Claim 12

An apparatus for manufacturing a display apparatus, the apparatus comprising:
a chamber;
a source portion arranged in the chamber and configured to supply a deposition material into the chamber;
a first mask configured to be arranged in the chamber and comprising a first opening, through which the deposition material is configured to pass; and
a second mask configured to be selectively arranged in the chamber to be replaceable with the first mask, the second mask comprising a second opening, through which the deposition material is configured to pass,
wherein the first mask comprises a first protrusion protruding towards an inner portion of the first opening and configured to block the deposition material,
wherein a portion of an inner surface of the first opening adjacent to the first protrusion has a concavo-convex shape comprising a plurality of protrusions and a plurality of recesses alternately arranged,
wherein the second mask comprises a second protrusion protruding towards an inner portion of the second opening and configured to block the deposition material, and
wherein a portion of an inner surface of the second opening adjacent to the second protrusion has the concavo-convex shape comprising a plurality of protrusions and a plurality of recesses alternately arranged,
wherein two or more of the protrusions of the first mask are different from one another, the concavo-convex shape of the first mask being atypical, and
wherein two or more of the protrusions of the second mask are different from one another, the concavo-convex shape of the second mask being atypical.