# US 12,772,492 B2 · NLDMOS semiconductor device

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- Number: US 12,772,492 B2
- Document ID: US12772492B2
- Status: Granted
- Kind: B2
- Application number: 18/260,140
- Filed: 2021-08-17
- Published: 2024-02-15
- Granted: 2026-10-20
- Earliest claimed: 2020-12-31
- Assignees: Csmc Technologies Fab2 Co., Ltd.
- Applicants: Csmc Technologies Fab2 Co., Ltd.
- Inventors: Qiong Wang
- Web page: https://patentgrep.com/patent/US12772492B2

## CPC

- H10D 30/655: {having edge termination structures}
- H10D 62/116: {adjoining the input or output regions of field-effect devices, e.g. adjoining source or drain regions}
- H10D 62/126: {Top-view geometrical layouts of the regions or the junctions}
- H10D 64/111: {Field plates}
- H10D 64/519: {characterised by their top-view geometrical layouts}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES

## Abstract

This application provides a semiconductor device. The semiconductor device includes: a substrate (101) having a first conductivity type; an STI structure (108) disposed in the substrate (101) in the form of a first ring-like structure and surrounding a portion of the substrate (101), wherein a portion of the substrate surrounded by the STI structure serves as an active area (105); a drain doped region (103) disposed an a top of a central portion of the active area (105) and having a second conductivity type; source doped regions (102) having the second conductivity type, wherein the source doped regions are disposed at the top of the active area (105) on opposite sides of the drain doped region (103) and are spaced apart from the drain doped region (103); a field oxide layer (104) that is disposed over the top surface of the substrate (101) within the active area (105) in the form of a second ring-like structure and surrounds the drain doped region (103); gate polysilicon (106) that is disposed over the top surface of the substrate (101) and is in the form of a third ring-like structure surrounding the field oxide layer (104); and a drift region (107) having the second conductivity type wherein the drift region is disposed in the substrate (101) and surrounds the drain doped region (103).

## Claims

### Claim 1

A semiconductor device, comprising:
a substrate having a first conductivity type;
a shallow trench isolation (STI) structure disposed in the substrate in a form of a first ring-like structure, wherein a portion of the substrate surrounded by the STI structure serves as an active area;
a drain doped region disposed at a top of a central portion of the active area and having a second conductivity type that is opposite to the first conductivity type;
two source doped regions having the second conductivity type, wherein the source doped regions are disposed at the top of the active area on opposite sides of the drain doped region and are spaced apart from the drain doped region, and wherein a line connecting the drain doped region and the source doped regions defines a first direction, and a second direction is defined to be perpendicular to the first direction in a plane of the substrate, wherein the two source doped regions are arranged along the first direction without being arranged along the second direction;
a field oxide layer disposed over a top surface of the substrate within the active area, the field oxide layer being in a form of a second ring-like structure and surrounding the drain doped region, wherein an outer boundary of the field oxide layer is spaced from the STI structure by a predetermined distance that is greater than 0;
a gate polysilicon that is disposed over the top surface of the substrate and is in a form of a third ring-like structure surrounding the field oxide layer, wherein the gate polysilicon extends in the first direction from a position over the source doped regions to a position over the field oxide layer, wherein the gate polysilicon extends in the second direction from a position over the STI structure to a position over the field oxide layer, and wherein a gate oxide layer is provided between the gate polysilicon and the substrate; and
a drift region having the second conductivity type, wherein the drift region is disposed in the substrate, surrounds the drain doped region and is spaced apart from the source doped regions, and wherein the drift region extends in the second direction to a position under the STI structure,
wherein a portion of the active area extending in the second direction acts as a withstand voltage region of the device; and a portion of the active area extending in the first direction between the drain doped region and the source doped regions serves as an operating and withstand voltage region of the device.

### Claim 2 (depends on 1)

The semiconductor device according to claim 1, wherein a length of the field oxide layer in the first direction is smaller than a length of the field oxide layer in the second direction.

### Claim 3 (depends on 1)

The semiconductor device according to claim 1, wherein a length of the gate polysilicon in the first direction is smaller than a length of the gate polysilicon in the second direction.

### Claim 4 (depends on 1)

The semiconductor device according to claim 1, wherein in the second direction, the predetermined distance from the outer boundary of the field oxide layer to the STI structure ranges from 0.5 μm to 0.8 μm.

### Claim 5 (depends on 1)

The semiconductor device according to claim 1, wherein each of the second ring-like structure and the third ring-like structure is an octagon.

### Claim 6 (depends on 1)

The semiconductor device according to claim 1, wherein an outer contour of the drift region is an octagon in the plane of the substrate.

### Claim 7 (depends on 1)

The semiconductor device according to claim 1, wherein the field oxide layer is formed over the drift region and an outer boundary of the drift region completely encircles and surrounds the outer boundary of the field oxide layer.

### Claim 8 (depends on 1)

The semiconductor device according to claim 1, wherein in the plane of the substrate, the source doped regions on opposite sides of the drain doped region are arranged in an axial symmetry with respect to the drain doped region.

### Claim 9 (depends on 1)

The semiconductor device according to claim 1, wherein the plane of the substrate is a horizontal plane, and wherein a geometric center of the first ring-like structure, a geometric center of the second ring-like structure, a geometric center of the third ring-like structure and a geometric center of an outer contour of the drift region are in coincidence in the horizontal plane.

### Claim 10 (depends on 1)

The semiconductor device according to claim 1, wherein the field oxide layer is a local oxidation of silicon (LOCOS) field oxide layer.

### Claim 11 (depends on 1)

The semiconductor device according to claim 1, further comprising a metal field plate spanning over the gate polysilicon and the field oxide layer, wherein a first dielectric layer is disposed between the metal field plate and the gate polysilicon, and a second dielectric layer is disposed between the metal field plate and the field oxide layer.

### Claim 12 (depends on 1)

The semiconductor device according to claim 1, wherein a critical dimension of the active area in the second direction is greater than a critical dimension of the active area in the first direction.

### Claim 13 (depends on 1)

The semiconductor device according to claim 1, wherein a substrate pickup structure is disposed at an outer side of the source doped regions, wherein the substrate pickup structure has a same conductivity type as a conductivity type of the substrate.

### Claim 14 (depends on 1)

The semiconductor device according to claim 1, wherein the semiconductor device is an N-type laterally-double diffused metal-oxide semiconductor (NLDMOS) device with a withstand voltage requirement equal to or greater than 100 V.

### Claim 15 (depends on 1)

The semiconductor device according to claim 1, further comprising an N-well formed in the drift region, wherein the N-well surrounding the drain doped region has a depth that is greater than a depth of the drift region.

### Claim 16 (depends on 1)

The semiconductor device according to claim 1, wherein an outer contour of the active area in a plane of the substrate comprises an octagon and two rectangles that are adjacent and connected to two sides of the octagon.