# US 12,765,336 B2 · Planarization system, planarizing method, and method of manufacturing an article > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,765,336 B2 - Document ID: US12765336B2 - Status: Granted - Kind: B2 - Application number: 18/341,290 - Filed: 2023-06-26 - Published: 2024-12-26 - Granted: 2026-10-13 - Earliest claimed: 2023-06-26 - Assignees: Canon Kabushiki Kaisha - Applicants: Canon Kabushiki Kaisha - Inventors: Steven C. Shackleton; Seth J. Bamesberger; Byung-Jin Choi - Web page: https://patentgrep.com/patent/US12765336B2 ## CPC - H10P 95/06: {Planarisation of inorganic insulating materials} - H10P 14/6346: {using printing, e.g. ink-jet printing} - H10P 14/6538: {by exposure to UV light} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A planarizing method includes dispensing formable material onto a substrate, positioning the substrate relative to a substrate chuck by contacting the substrate with a first protrusion of an engagement mechanism, the engagement mechanism being disposed adjacent the substrate chuck, contacting a superstrate held by a superstrate chuck with the formable material, thereby forming a film of formable material between the superstrate and the substrate, curing the film of formable material to form a cured layer between the superstrate and the substrate, and initiating a separation front between the cured layer and the superstrate by contacting the superstrate with a second protrusion of the engagement mechanism. ## Claims ### Claim 1 A planarizing method, comprising: dispensing formable material onto a substrate; positioning the substrate relative to a substrate chuck by contacting the substrate with a first protrusion of an engagement mechanism, the engagement mechanism being disposed adjacent the substrate chuck, contacting a superstrate held by a superstrate chuck with the formable material, thereby forming a film of formable material between the superstrate and the substrate; curing the film of formable material to form a cured layer between the superstrate and the substrate; and initiating a separation front between the cured layer and the superstrate by contacting the superstrate with a second protrusion of the engagement mechanism, wherein the substrate has an outer edge portion defining a notch, and wherein the size and shape of the first protrusion is selected to engage within the notch. ### Claim 2 (depends on 1) The method of claim 1, wherein positioning the substrate includes contacting the outer edge portion with the first protrusion. ### Claim 3 (depends on 2) The method of claim 2, further comprising rotating the substrate while contacting the outer edge portion with the first protrusion. ### Claim 4 (depends on 3) The method of claim 3, further comprising translating the substrate while contacting the outer edge portion with the first protrusion. ### Claim 5 (depends on 2) The method of claim 2, further comprising lowering the substrate onto one or more mounting pins while contacting the outer edge portion with the first protrusion. ### Claim 6 (depends on 5) The method of claim 5, wherein the second protrusion contacts the superstrate after passing though the notch. ### Claim 7 (depends on 1) The method of claim 1, wherein initiating the separation front includes lifting the engagement mechanism such that the second protrusion passes through the notch without contacting the outer edge portion. ### Claim 8 (depends on 1) The method of claim 1, further comprising lifting the engagement mechanism to an elevated position prior to positioning the substrate. ### Claim 9 (depends on 1) The method of claim 1, further comprising lowering the engagement mechanism to a retracted position prior to contacting the superstrate with the formable material. ### Claim 10 (depends on 9) The method of claim 9, wherein, in the retracted position, the first protrusion and the second protrusion are located within a notch of the substrate chuck. ### Claim 11 (depends on 1) The method of claim 1, wherein the second protrusion overlaps the first protrusion in a direction perpendicular to a radial direction. ### Claim 12 (depends on 1) The method of claim 1, wherein the first protrusion has a first portion that extends farther in a direction perpendicular to a radial direction than a corresponding portion of the second protrusion. ### Claim 13 (depends on 1) The method of claim 1, further comprising: carrying the substrate to the substrate chuck using a hand, wherein the hand includes at least one contact mechanism aligned with an end of the substrate. ### Claim 14 (depends on 13) The method of claim 13, wherein the at least one contact mechanism is a compliance pad. ### Claim 15 (depends on 14) The method of claim 14, wherein the compliance pad includes a spring-loaded plunger or a load cell. ### Claim 16 (depends on 1) The method of claim 1, further comprising, fully separating the superstrate from the cured layer after initiating the separation front. ### Claim 17 A planarizing method, comprising: dispensing formable material onto a substrate; positioning the substrate relative to a substrate chuck by contacting the substrate with a first protrusion of an engagement mechanism, the engagement mechanism being disposed adjacent the substrate chuck, contacting a superstrate held by a superstrate chuck with the formable material, thereby forming a film of formable material between the superstrate and the substrate; curing the film of formable material to form a cured layer between the superstrate and the substrate; and initiating a separation front between the cured layer and the superstrate by contacting the superstrate with a second protrusion of the engagement mechanism, wherein the engagement mechanism comprises a body, and wherein each of the first protrusion and the second protrusion extends from the body. ### Claim 18 A method of manufacturing an article, comprising: dispensing a formable material on a substrate; positioning the substrate relative to a substrate chuck by contacting the substrate with a first protrusion of an engagement mechanism, the engagement mechanism being disposed adjacent the substrate chuck; contacting a superstrate held by a superstrate chuck with the formable material, thereby forming a film of formable material between the superstrate and the substrate; curing the film of formable material to form a cured layer between the superstrate and the substrate; and initiating a separation front between the cured layer and the superstrate by contacting the superstrate with a second protrusion of the engagement mechanism; fully separating the superstrate from the cured layer; and processing the cured formable material to make the article, wherein the substrate has an outer edge portion defining a notch, and wherein the size and shape of the first protrusion is selected to engage within the notch. ### Claim 19 A method of manufacturing an article, comprising: dispensing a formable material on a substrate; positioning the substrate relative to a substrate chuck by contacting the substrate with a first protrusion of an engagement mechanism, the engagement mechanism being disposed adjacent the substrate chuck; contacting a superstrate held by a superstrate chuck with the formable material, thereby forming a film of formable material between the superstrate and the substrate; curing the film of formable material to form a cured layer between the superstrate and the substrate; and initiating a separation front between the cured layer and the superstrate by contacting the superstrate with a second protrusion of the engagement mechanism; fully separating the superstrate from the cured layer; and processing the cured formable material to make the article, wherein the engagement mechanism comprises a body, and wherein each of the first protrusion and a second protrusion extends from the body.