Shaft members, process kits and semiconductor processing systems having shaft members, and methods of making semiconductor processing systems

A method of making a semiconductor processing system, comprising:

• at a shaft member including a cylindrical body formed from a ceramic material and having a drive segment extending about a rotation axis, a frustoconical segment axially offset from the drive segment, and an end key segment extending axially from the frustoconical segment and axially separated from the drive segment by the frustoconical segment of the cylindrical body, the end key segment having a first circumferential facet and a second circumferential facet circumferentially opposite the first circumferential facet;
• registering a support member having an end key socket to the end key segment of the shaft member in rotation about the rotation axis;
• slidably seating the end key segment of the shaft member within the end key socket of the support member;
• and
• rotationally fixing the support member relative to the shaft member by abutting the first circumferential facet against a first circumferential face of the support member.