Substrate transfer system and image correction method
AssigneeTokyo Electron Limited
InventorIsamu Taoda
Life of this patent
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Abstract
A substrate transfer system includes: a transfer device provided with a substrate holder configured to hold a substrate; a lower line camera provided in a transfer path of the substrate to capture an image of a rear surface of the substrate which is being transferred and an image of the substrate holder; an upper line camera provided in the transfer path of the substrate to capture an image of a front surface of the substrate which is being transferred; and a controller that generates a rear-surface image based on the image captured by the lower line camera and generates a front-surface image based on the image captured by the upper line camera.
Claims13
A substrate transfer system comprising:
- a transfer device including a substrate holder configured to hold a substrate;
- a lower line camera provided in a transfer path of the substrate to capture an image of a rear surface of the substrate which is being transferred and an image of the substrate holder;
- an upper line camera provided in the transfer path of the substrate to capture an image of a front surface of the substrate which is being transferred;
- and
- a controller that generates a rear-surface image based on the image captured by the lower line camera and generates a front-surface image based on the image captured by the upper line camera,
- wherein the substrate holder has a linear portion that extends in a transfer direction of the substrate,
- wherein the controller is configured to:
- detect the linear portion of the substrate holder from the rear-surface image;
- and
- detect a tilt of the substrate holder and a first amount of zig-zag movement in a transfer trajectory of the substrate from a shape of the detected linear portion of the rear-surface image, and
- wherein the controller is configured to correct the front-surface image based on the tilt of the substrate holder and the first amount of zig-zag movement in the transfer trajectory of the substrate.
A substrate transfer system comprising:
- a transfer device including a substrate holder configured to hold a substrate;
- a lower line camera provided in a transfer path of the substrate to capture an image of a rear surface of the substrate which is being transferred and an image of the substrate holder;
- an upper line camera provided in the transfer path of the substrate to capture an image of a front surface of the substrate which is being transferred;
- and
- a controller that generates a rear-surface image based on the image captured by the lower line camera and generates a front-surface image based on the image captured by the upper line camera,
- wherein the substrate holder has a linear portion that extends in a transfer direction of the substrate,
- wherein the controller is configured to:
- detect the linear portion of the substrate holder from the rear-surface image;
- and
- detect a tilt of the substrate holder and a first amount of zig-zag movement in a transfer trajectory of the substrate from a shape of the detected linear portion of the rear-surface image,
- wherein the transfer device includes a motion detector configured to detect a motion of the substrate holder, and
- wherein the controller is configured to compare a second amount of zig-zag movement in the transfer trajectory of the substrate detected by the motion detector with the first amount of zig-zag movement in the transfer trajectory detected from the rear-surface image, and determine whether or not tendencies of the second amount of zig-zag movement and the first amount of zig-zag movement coincide with each other.
Dependencies are inferred from the claim text.