Substrate processing system, substrate processing apparatus, method of manufacturing semiconductor device, and recording medium

A substrate processing apparatus, comprising:

• a memory configured to be capable of storing data of the substrate processing apparatus that is reported during a processing of a substrate;
• a communicator configured to be capable of being connected to a data manager configured to acquire the stored data;
• and
• a controller configured to be capable of:
• controlling the processing of the substrate according to a recipe including at least one processing step defining conditions for substrate processing;
• determining whether the recipe includes a specific step, data for which is equal to or less than a predefined data acquirable range;
• and
• in response to determining that the recipe includes the specific step, the data for which is equal to or less than the predefined data acquirable range, when a number of at least one step, which includes the specific step, among the at least one processing step, is specified such that data for the at least one step acquired by the data manager falls within the predefined data acquirable range, instructing the memory to collect the data for at least one step among the at least one processing step.

A method of manufacturing a semiconductor device, comprising:

• performing processing of a substrate according to a recipe including at least one processing step defining conditions for substrate processing;
• storing data of an apparatus that is reported during the processing of the substrate;
• and
• determining whether the recipe includes a specific step, data for which is equal to or less than a predefined data acquirable range;
• in response to determining that the recipe includes the specific step, the data for which is equal to or less than the predefined data acquirable range, specifying a number of at least one step, which includes the specific step, among the at least one processing step, such that data for the at least one step falls within the predefined data acquirable range;
• and
• acquiring the data for the at least one step.