Piezoelectric element and liquid droplet dispensing head
AssigneeSeiko Epson Corporation
InventorsMasahiro Takeuchi, Yasuhiro Horiba, Yasuhiro Itayama
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Abstract
A piezoelectric element according to the present disclosure includes: a substrate; a first adhesion layer formed on the substrate and containing titanium; at least one of second adhesion layers formed on the substrate and containing titanium oxide; a first electrode formed on the first adhesion layer and the second adhesion layer; a seed layer formed on the first electrode and the substrate and containing titanium; a piezoelectric layer formed on the seed layer; and a second electrode formed on the piezoelectric layer. At least a part of an end portion of the first electrode is formed on the second adhesion layer.
Claims8
A piezoelectric element comprising:
- a substrate;
- a first adhesion layer formed on the substrate and containing titanium;
- at least one of second adhesion layers formed on the substrate and containing titanium oxide;
- a first electrode formed on the first adhesion layer and the second adhesion layer;
- a seed layer formed on the first electrode and the substrate and containing titanium;
- a piezoelectric layer formed on the seed layer;
- and
- a second electrode formed on the piezoelectric layer, wherein
- at least a part of an end portion of the first electrode is formed on the second adhesion layer.
Dependencies are inferred from the claim text.