# US 12,765,095 B2 · Optical detector and electronic apparatus including metasurface elements and complementary color filters for color separation

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- Number: US 12,765,095 B2
- Document ID: US12765095B2
- Status: Granted
- Kind: B2
- Application number: 18/293,296
- Filed: 2022-07-29
- Published: 2024-10-10
- Granted: 2026-10-13
- Earliest claimed: 2021-08-06
- Assignees: Sony Semiconductor Solutions Corporation
- Applicants: Sony Semiconductor Solutions Corporation
- Inventors: Atsushi Toda
- Web page: https://patentgrep.com/patent/US12765095B2

## CPC

- H10F 39/8053: {Colour filters}
- H10F 39/182: {Colour image sensors}
- H10F 39/802: {Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes}
- H10F 39/806: {Optical elements or arrangements associated with the image sensors}
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION

## Abstract

Provided is an optical detector that includes a photoelectric conversion layer in which photoelectric conversion elements are in a matrix shape and a filter layer including complementary color filters on an incident surface of the photoelectric conversion layer, where each of the complementary color filters blocks a specific wavelength in the incident light. The optical detector further includes a metasurface layer including metasurface elements between the photoelectric conversion layer and the filter layer, where each of the metasurface elements is associated with a corresponding set of photoelectric conversion elements of the photoelectric conversion elements, and each of the metasurface elements includes refractive index materials. Each of the metasurface elements separates, by wavelengths, light having passed through the complementary color filters, into components through the refractive index materials, and guides the components of the light separated by wavelengths toward the corresponding set of photoelectric conversion elements.

## Claims

### Claim 1

An optical detector, comprising:
a photoelectric conversion layer that includes a plurality of photoelectric conversion elements in a matrix shape, wherein the plurality of photoelectric conversion elements is configured to generate, based on incident light, electric charges by photoelectric conversion;
a filter layer including a plurality of complementary color filters, wherein
the plurality of complementary color filters is on an incident surface of the photoelectric conversion layer,
each complementary color filter of the plurality of complementary color filters is associated with a corresponding set of photoelectric conversion elements of the plurality of photoelectric conversion elements, and
each complementary color filter of the plurality of complementary color filters is configured to block first light of a specific wavelength in the incident light; and
a metasurface layer including a plurality of metasurface elements, wherein
the plurality of metasurface elements is between the photoelectric conversion layer and the filter layer,
each metasurface element of the plurality of metasurface elements is associated with the corresponding set of photoelectric conversion elements,
each metasurface element of the plurality of metasurface elements includes a plurality of refractive index materials,
the plurality of refractive index materials has:
a plurality of different widths based on wavelengths of the incident light, and
a pitch smaller than a target light wavelength associated with the incident light, and
each metasurface element of the plurality of metasurface elements is configured to:
separate, into components, second light of the incident light that has passed through a complementary color filter of the plurality of complementary color filters, wherein
the separation of the second light is based on wavelengths of the second light, and
the separation of the second light into the components is via the plurality of refractive index materials of a corresponding metasurface element of the plurality of metasurface elements; and
guide the components of the separated second light toward the corresponding set of photoelectric conversion elements.

### Claim 2 (depends on 1)

The optical detector according to claim 1, wherein
the plurality of complementary color filters includes:
a plurality of first complementary color filters configured to block third light of the incident light, wherein the plurality of first complementary color filters is in one of a row direction of the optical detector or a column direction of the optical detector, and
a plurality of second complementary color filters in the one of the row direction or the column direction,
the plurality of second complementary color filters is configured to block fourth light of the incident light,
the first light includes the third light and the fourth light, and
a wavelength of the third light is different from a wavelength of the fourth light.

### Claim 3 (depends on 1)

The optical detector according to claim 1, further comprising on-chip lenses between the metasurface layer and the photoelectric conversion layer, wherein
each on-chip lens of the on-chip lenses is associated with a respective photoelectric conversion element of the corresponding set of photoelectric conversion elements, and
the on-chip lenses are configured to condense the components of the separated second light.

### Claim 4 (depends on 1)

The optical detector according to claim 1, further comprising primary color filters between the metasurface layer and the photoelectric conversion layer, wherein
each primary color filter of the primary color filters is associated with a respective photoelectric conversion element of the corresponding set of photoelectric conversion elements, and
each primary color filter of the primary color filters is configured to allow third light of a specific wavelength in the separated second light to pass therethrough.

### Claim 5 (depends on 1)

The optical detector according to claim 1, further comprising:
on-chip lenses between the metasurface layer and the photoelectric conversion layer, wherein
each on-chip lens of the on-chip lenses is associated with a respective photoelectric conversion element of the corresponding set of photoelectric conversion elements, and
the on-chip lenses are configured to condense the light components of the separated second light; and
primary color filters between the on-chip lenses and the photoelectric conversion layer, wherein
each primary color filter of the primary color filters is associated with a respective photoelectric conversion element of the corresponding set of photoelectric conversion elements, and
each primary color filter of the primary color filters is configured to allow third light of a specific wavelength in the separated second light to pass therethrough.

### Claim 6 (depends on 1)

The optical detector according to claim 1, wherein
in the photoelectric conversion layer, each photoelectric conversion element of the plurality of photoelectric conversion elements is split into a plurality of split photoelectric conversion elements of a same color, and
each photoelectric conversion element of the plurality of photoelectric conversion elements is further configured to execute an image plane phase difference function based on outputs of the plurality of split photoelectric conversion elements of a corresponding photoelectric conversion element of the plurality of photoelectric conversion elements.

### Claim 7 (depends on 1)

The optical detector according to claim 1, further comprising a plurality of pixels, wherein
each pixel of the plurality of pixels includes a respective photoelectric conversion element of the plurality of photoelectric conversion elements, and
in a case where a width of each pixel of the plurality of pixels corresponds to a cycle, each complementary color filter of the plurality of complementary color filters and each metasurface element of the plurality of metasurface elements are deviated from a respective photoelectric conversion element of the plurality of photoelectric conversion elements by half of the cycle.

### Claim 8 (depends on 1)

The optical detector according to claim 1, wherein
the plurality of refractive index materials of each metasurface element of the plurality of metasurface elements includes a pair of refractive index materials,
the pair of refractive index materials has one of line shapes or pillar shapes.

### Claim 9 (depends on 8)

The optical detector according to claim 8, wherein
the plurality of refractive index materials of each metasurface element of the plurality of metasurface elements includes a plurality of pairs of refractive index materials,
the plurality of pairs of refractive index materials includes the pair of refractive index materials, and
the plurality of pairs of refractive index materials has the pillar shapes.

### Claim 10 (depends on 3)

The optical detector according to claim 3, wherein each on-chip lens of the on-chip lenses has one of a circular shape or a box-like shape.

### Claim 11

An electronic apparatus, comprising:
an optical detector including:
a photoelectric conversion layer that includes a plurality of photoelectric conversion elements in a matrix shape, wherein the plurality of photoelectric conversion elements is configured to generate, based on incident light, electric charges by photoelectric conversion;
a filter layer including a plurality of complementary color filters, wherein
the plurality of complementary color filters is on an incident surface of the photoelectric conversion layer,
each complementary color filter of the plurality of complementary color filters is associated with a corresponding set of photoelectric conversion elements of the plurality of photoelectric conversion elements, and
each complementary color filter of the plurality of complementary color filters is configured to block first light of a specific wavelength in the incident light; and
a metasurface layer including a plurality of metasurface elements, wherein
the plurality of metasurface elements is between the photoelectric conversion layer and the filter layer,
each metasurface element of the plurality of metasurface elements is associated with the corresponding set of photoelectric conversion elements,
each metasurface element of the plurality of metasurface elements includes a plurality of refractive index materials,
the plurality of refractive index materials has:
a plurality of different widths based on wavelengths of the incident light, and
a pitch smaller than a target light wavelength associated with the incident light, and
each metasurface element of the plurality of metasurface elements is configured to:
separate, into components, second light of the incident light that has having passed through a complementary color filter of the plurality of complementary color filters, wherein
the separation of the second light is based on wavelengths of the second light, and
the separation of the second light into the components is via the plurality of refractive index materials of a corresponding metasurface element of the plurality of metasurface elements; and
guide the components of the separated second light toward the corresponding set of photoelectric conversion elements.

### Claim 12

An optical detector, comprising:
a photoelectric conversion layer that includes a plurality of photoelectric conversion elements in a matrix shape, wherein the plurality of photoelectric conversion elements is configured to generate, based on incident light, electric charges by photoelectric conversion;
a filter layer including a plurality of complementary color filters, wherein
the plurality of complementary color filters is on an incident surface of the photoelectric conversion layer,
each complementary color filter of the plurality of complementary color filters is associated with a corresponding set of photoelectric conversion elements of the plurality of photoelectric conversion elements, and
each complementary color filter of the plurality of complementary color filters is configured to block first light of a specific wavelength in the incident light;
a metasurface layer including a plurality of metasurface elements, wherein
the plurality of metasurface elements is between the photoelectric conversion layer and the filter layer,
each metasurface element of the plurality of metasurface elements is associated with the corresponding set of photoelectric conversion elements,
each metasurface element of the plurality of metasurface elements includes a plurality of refractive index materials,
the plurality of refractive index materials has:
a plurality of different widths based on wavelengths of the incident light, and
a pitch smaller than a target light wavelength associated with the incident light, and
each metasurface element of the plurality of metasurface elements is configured to:
separate, into components, second light of the incident light that has passed through a complementary color filter of the plurality of complementary color filters, wherein
the separation of the second light is based on wavelengths of the second light, and
the separation of the second light into the components is via the plurality of refractive index materials of a corresponding metasurface element of the plurality of metasurface elements; and
guide the components of the separated second light toward the corresponding set of photoelectric conversion elements; and
primary color filters between the metasurface layer and the photoelectric conversion layer, wherein
each primary color filter of the primary color filters is associated with a respective photoelectric conversion element of the corresponding set of photoelectric conversion elements, and
each primary color filter of the primary color filters is configured to allow third light of a specific wavelength in the separated second light to pass therethrough.