Ferroelectric field-effect memory device
AssigneeImec Vzw
InventorsAmey Mahadev Walke, Jan Van Houdt
Life of this patent
Estimating the term…
Loading patent…
AssigneeImec Vzw
InventorsAmey Mahadev Walke, Jan Van Houdt
Estimating the term…
The disclosed technology relates to a ferroelectric field-effect transistor (FeFET) memory structure. The FeFET memory structure can include a substrate, including an insulator layer; a gate metal layer on the insulator layer; at least one ferroelectric material layer on the gate metal layer; and a layer structure comprising at least one wide bandgap semiconductor layer on the ferroelectric material layer, wherein the layer structure can include: a first section having a first height, and at least one second section having a second height that is smaller than the first height. The FeFET memory structure can further include a drain metal structure which is arranged on the first section of the layer structure, and one or more source metal structures, wherein each source metal structure is arranged on a respective second section of the layer structure.
A ferroelectric field-effect transistor (FeFET) memory structure, comprising:
A method of fabricating a ferroelectric field-effect transistor (FeFET) memory structure, the method comprising:
Dependencies are inferred from the claim text.