# US 12,764,413 B2 · Monitoring substrate and monitoring method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,764,413 B2 - Document ID: US12764413B2 - Status: Granted - Kind: B2 - Application number: 18/843,894 - Filed: 2023-03-01 - Published: 2025-07-10 - Granted: 2026-10-13 - Earliest claimed: 2022-03-15 - Assignees: Tokyo Electron Limited - Applicants: Tokyo Electron Limited - Inventors: Isamu Taoda - Web page: https://patentgrep.com/patent/US12764413B2 ## CPC - H04N 23/64: {Computer-aided capture of images, e.g. transfer from script file into camera, check of taken image quality, advice or proposal for image composition or decision on when to take image} - G06T 7/0004: {Industrial image inspection} - G06T 7/90: Determination of colour characteristics - H04N 23/52: Elements optimising image sensor operation, e.g. for electromagnetic interference [EMI] protection or temperature control by heat transfer or cooling elements - H04N 23/56: provided with illuminating means - H04N 23/74: by influencing the scene brightness using illuminating means - G06T 2207/10024: Color image - G06T 2207/30148: Semiconductor; IC; Wafer - H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION - G06T: IMAGE DATA PROCESSING OR GENERATION, IN GENERAL ## Abstract A monitoring substrate for monitoring an inside of a substrate processing apparatus comprises a position detection sensor, a camera, a light source, a storage part and a controller. The position detection sensor configured to detect a position of the monitoring substrate, the camera configured to capture an image of the inside of the substrate processing apparatus maintained at a vacuum atmosphere, the light source configured to illuminate the inside of the substrate processing apparatus, the storage part configured to store the image captured by the camera, and the controller configured to control the camera and the light source. ## Claims ### Claim 1 A monitoring substrate for monitoring an inside of a substrate processing apparatus, comprising: a position detection sensor configured to detect moving direction and acceleration of the monitoring substrate; a camera configured to capture an image of the inside of the substrate processing apparatus maintained at a vacuum atmosphere; a light source configured to illuminate the inside of the substrate processing apparatus; a storage part configured to store the image captured by the camera; and a controller configured to control the camera and the light source, wherein the position detection sensor is configured to output direction data and acceleration data of the monitoring substrate to the controller, and wherein the controller is configured, based on the direction data and the acceleration data, to detect the position of the monitoring substrate and to control the camera and the light source to capture images. ### Claim 2 (depends on 1) The monitoring substrate of claim 1, wherein the position detection sensor is a gyro sensor and an acceleration sensor. ### Claim 3 (depends on 1) The monitoring substrate of claim 1, wherein the inside of the substrate processing apparatus is an inside of a chamber where a substrate is processed. ### Claim 4 (depends on 3) The monitoring substrate of claim 3, wherein the camera is disposed to capture an image of one or more of a placing table and an upper electrode disposed in the chamber. ### Claim 5 (depends on 1) The monitoring substrate of claim 1, wherein the controller is configured to store the position of the monitoring substrate where the image was captured in association with the image in the storage part. ### Claim 6 (depends on 1) The monitoring substrate of claim 1, further comprising: a heat conductive member or a heat capacity member that connects the position detection sensor, the camera, and the light source. ### Claim 7 (depends on 6) The monitoring substrate of claim 6, wherein the heat conductive member or the heat capacity member equalizes an inner temperature of the monitoring substrate, and temperatures of the position detection sensor, the camera, and the light source. ### Claim 8 (depends on 1) The monitoring substrate of claim 1, further comprising: a wireless communication part configured to perform wireless communication with the substrate processing apparatus. ### Claim 9 (depends on 8) The monitoring substrate of claim 8, wherein the controller is configured to control the wireless communication part to transmit the stored image to the substrate processing apparatus when the monitoring substrate is transferred to an atmospheric environment. ### Claim 10 (depends on 1) The monitoring substrate of claim 1, further comprising: a heat conductive member or a heat capacity member that connects the position detection sensor, the camera, and the light source and equalizes an inner temperature of the monitoring substrate and temperatures of the position detection sensor, the camera, and the light source; and a wireless communication part configured to perform wireless communication with the substrate processing apparatus, wherein the controller is configured to: control the camera and the light source to capture the image based on the position of the monitoring substrate detected by the position detection sensor; store the position of the monitoring substrate where the image was captured in association with the image in the storage part; and control the wireless communication part to transmit the stored image to the substrate processing apparatus when the monitoring substrate is transferred to an atmospheric environment. ### Claim 11 A monitoring method for a monitoring substrate configured to monitor an inside of a substrate processing apparatus, wherein the monitoring substrate includes: a position detection sensor configured to detect moving direction and acceleration of the monitoring substrate; a camera configured to capture an image of the inside of the substrate processing apparatus maintained at a vacuum atmosphere; a light source configured to illuminate the inside of the substrate processing apparatus; a storage part configured to store the image captured by the camera; and a wireless communication part configured to perform wireless communication with the substrate processing apparatus, the monitoring method comprising: allowing the substrate processing apparatus to transfer the monitoring substrate to a part of the inside of the substrate processing apparatus that is maintained at a vacuum atmosphere; allowing the position detection sensor to output direction data and acceleration data of the monitoring substrate, controlling the camera and the light source to allow the monitoring substrate to capture an image based on the direction data and the acceleration data; allowing the monitoring substrate to store the position of the monitoring substrate where the image was captured in association with the image in the storage part, based on the direction data and the acceleration data; allowing the substrate processing apparatus to transfer the monitoring substrate to a part of the inside of the substrate processing apparatus that is maintained at an atmospheric atmosphere; allowing the monitoring substrate to transmit the stored image to the substrate processing apparatus by the wireless communication when the monitoring substrate is transferred to the part maintained at the atmospheric atmosphere; and allowing the substrate processing apparatus to estimate cleaning timing based on RGB values and brightness values of the received image.