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US 12,763,750 B2Granted
Beat mode suppression in powerbars and quadbars
AssigneeAvago Technologies International Sales Pte. Limited
InventorsMichael Gruber, Alberto Hueltes, Andriy Yatsenko, Martin Handtmann, Florian Hrubesch
Life of this patent
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Abstract
A resonator for beat mode suppression is provided. A resonator includes a substrate comprising a top surface, a bottom electrode disposed on the top surface of the substrate, a piezoelectric layer disposed on the bottom electrode, and a top electrode disposed on the piezoelectric layer. The bottom electrode includes a first elongated member configured to extend longitudinally along the top surface on a first side of the substrate.
Claims20
An apparatus comprising:
- one or more first resonators, each first resonator having a respective parasitic capacitance;
- a second resonator having a second parasitic capacitance, the second resonator comprising:
- a substrate;
- a bottom electrode disposed on the substrate;
- a piezoelectric layer disposed on the bottom electrode;
- a top electrode disposed on the piezoelectric layer;
- wherein in a first region, the bottom electrode and top electrode overlap with no piezoelectric layer between the bottom electrode and top electrode, wherein an area of the first region is determined based, at least in part, on a difference in parasitic capacitance between the second resonator and at least one of the one or more first resonators.
4 more elements
A ladder filter, comprising:
- one or more series-arm resonators;
- and
- one or more parallel-arm resonators, wherein at least one of the series-arm resonators or the parallel-arm resonators comprises:
- a substrate;
- a bottom electrode disposed on the substrate;
- a piezoelectric layer disposed on the bottom electrode;
- and
- a top electrode disposed on the piezoelectric layer;
- wherein at a connecting edge of the at least one of the series-arm resonators or the parallel-arm resonators, the bottom electrode and the top electrode overlap in a dead region with no piezoelectric layer between the bottom electrode and the top electrode;
- and
- wherein an overlapping area of the dead region is based, at least in part, on a difference in parasitic capacitance between the at least one of the series-arm resonators or the parallel-arm resonators and an adjacent resonator of the ladder filter.
8 more elements
An apparatus, comprising:
- a first bulk acoustic wave resonator having a first parasitic capacitance;
- and
- a second bulk acoustic wave resonator having a second parasitic capacitance, the second resonator comprising:
- a substrate;
- a bottom electrode disposed on the substrate;
- a piezoelectric layer disposed on the bottom electrode;
- and
- a top electrode disposed on the piezoelectric layer;
- wherein at a connecting edge of the second resonator, the bottom electrode and the top electrode overlap in a dead region with no piezoelectric layer between the bottom electrode and the top electrode;
- and
- wherein an overlapping area of the dead region is based, at least in part, on a difference in parasitic capacitance between the first resonator and the second resonator.
8 more elements
Dependencies are inferred from the claim text.