Magnetically preloaded stage assembly for electronic components
AssigneeOrbotech Ltd.
InventorsTal Goichman, Ashkan Aghajani, Arkady Bronfman
Life of this patent
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AssigneeOrbotech Ltd.
InventorsTal Goichman, Ashkan Aghajani, Arkady Bronfman
Estimating the term…
A stage assembly for supporting and moving electronic components includes a guide rail. The stage assembly also includes a carrier for supporting an electronic component and moveable along a length of the guide rail. The stage assembly further includes a linear motor comprising a rotor and a stator assembly positioned along the length of the guide rail, the rotor operatively coupled to the carrier to actuate movement of the carrier along the length of the guide rail. The stage assembly yet further includes a flux shield formed of a ferromagnetic material and positioned between the stator assembly and the carrier. The stage assembly also includes one or more magnetic preload assemblies operatively coupled to the carrier.
A stage assembly for supporting and moving at least one electronic component comprising:
A stage assembly for supporting and moving at least one electronic component comprising:
A stage assembly for supporting and moving at least one electronic component comprising:
Dependencies are inferred from the claim text.