# US 12,763,543 B2 · Line narrowing laser device, and electronic device manufacturing method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,763,543 B2 - Document ID: US12763543B2 - Status: Granted - Kind: B2 - Application number: 18/807,533 - Filed: 2024-08-16 - Published: 2024-12-12 - Granted: 2026-10-13 - Earliest claimed: 2022-03-23 - Assignees: Gigaphoton Inc. - Applicants: Gigaphoton Inc. - Inventors: Shigeto Kishimoto; Hirotaka Miyamoto; Motoki Niwano - Web page: https://patentgrep.com/patent/US12763543B2 ## CPC - H01S 3/106: by controlling devices placed within the cavity ({H01S3/10076,} H01S3/13 take precedence) - G03F 7/70025: {by lasers} - G03F 7/70041: {by pulsed sources, e.g. multiplexing, pulse duration, interval control or intensity control} - H01S 3/08009: {using a diffraction grating} - H01S 3/225: comprising an excimer or exciplex - H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract A line narrowing laser device includes an optical element and a diffractive optical element positioned on an optical path of an optical resonator, a wavelength actuator configured to change an incident angle of light incident on the diffractive optical element by moving the optical element, a wavelength driver configured to drive the wavelength actuator, a processor configured to output a wavelength control signal to the wavelength driver so that a wavelength of pulse laser light output from the optical resonator periodically changes, and a notch filter arranged in a path of the wavelength control signal and configured to operate at a notch frequency different from a drive frequency of the wavelength actuator. ## Claims ### Claim 1 A line narrowing laser device comprising: an optical element and a diffractive optical element positioned on an optical path of an optical resonator; a wavelength actuator configured to change an incident angle of light incident on the diffractive optical element by moving the optical element; a wavelength driver configured to drive the wavelength actuator; a processor configured to receive a plurality of target wavelengths and output a wavelength control signal to the wavelength driver so that a wavelength of pulse laser light output from the optical resonator periodically changes among the target wavelengths, thereby performing two-wavelength oscillation or multiple-wavelength oscillation; and a notch filter arranged in a path of the wavelength control signal and configured to operate at a notch frequency different from a drive frequency of the wavelength actuator. ### Claim 2 (depends on 1) The line narrowing laser device according to claim 1, wherein the notch frequency is higher than the drive frequency. ### Claim 3 (depends on 1) The line narrowing laser device according to claim 1, wherein the notch frequency is a frequency of multiplication of the drive frequency by an odd number larger than 1. ### Claim 4 (depends on 1) The line narrowing laser device according to claim 1, wherein the notch frequency is set in accordance with a resonant frequency of an oscillation system of a wavelength switch mechanism which oscillates by periodic driving of the wavelength actuator. ### Claim 5 (depends on 4) The line narrowing laser device according to claim 4, wherein the notch filter is configured such that a notch parameter can be adjusted by the processor, and the processor adjusts the notch parameter when the resonant frequency changes. ### Claim 6 (depends on 1) The line narrowing laser device according to claim 1, wherein the notch filter includes first and second bandpass filters connected in series. ### Claim 7 (depends on 6) The line narrowing laser device according to claim 6, wherein the first and second bandpass filters operate at a same notch frequency and a same notch gain depth. ### Claim 8 (depends on 1) The line narrowing laser device according to claim 1, wherein the notch filter is configured such that a notch parameter can be adjusted by the processor. ### Claim 9 (depends on 8) The line narrowing laser device according to claim 8, wherein the notch parameter includes the notch frequency and a notch gain depth, and the processor adjusts the notch gain depth after adjusting the notch frequency. ### Claim 10 (depends on 8) The line narrowing laser device according to claim 8, further comprising a wavelength monitor positioned on an optical path of the pulse laser light, wherein the processor calculates a measurement wavelength of the pulse laser light based on an output of the wavelength monitor, and adjusts the notch parameter based on the measurement wavelength. ### Claim 11 (depends on 10) The line narrowing laser device according to claim 10, wherein the processor calculates a deviation between the measurement wavelength and a target wavelength of the pulse laser light, and adjusts the notch parameter based on the deviation. ### Claim 12 (depends on 11) The line narrowing laser device according to claim 11, wherein the processor compares the deviation with a threshold value, and adjusts the notch parameter when the deviation is larger than the threshold value over predetermined consecutive pulses. ### Claim 13 (depends on 12) The line narrowing laser device according to claim 12, wherein the notch parameter includes the notch frequency, and the processor calculates the deviation while increasing or decreasing the notch frequency, and searches for the notch frequency at which the deviation approaches 0. ### Claim 14 (depends on 12) The line narrowing laser device according to claim 12, wherein the notch parameter further includes a notch gain depth, and the processor calculates the deviation while increasing or decreasing the notch gain depth, and searches for the notch gain depth at which the deviation approaches 0. ### Claim 15 (depends on 10) The line narrowing laser device according to claim 10, wherein the processor calculates a wavelength difference between the measurement wavelengths of a plurality of pulses of the pulse laser light having different target wavelengths, and adjusts the notch parameter based on the wavelength difference. ### Claim 16 (depends on 15) The line narrowing laser device according to claim 15, wherein the processor calculates the wavelength difference a plurality of times to calculate an average value of the wavelength differences, and adjusts the notch parameter when the average value is larger than a threshold value. ### Claim 17 (depends on 1) The line narrowing laser device according to claim 1, wherein the notch filter includes first and second bandpass filters connected in series, and each of the first and second bandpass filters is configured such that a notch parameter thereof can be adjusted by the processor. ### Claim 18 (depends on 17) The line narrowing laser device according to claim 17, wherein the processor adjusts the notch parameter so that the first and second bandpass filters operate at a same notch frequency. ### Claim 19 (depends on 18) The line narrowing laser device according to claim 18, wherein the processor adjusts the notch parameter so that the first and second bandpass filters operate at a same notch gain depth. ### Claim 20 An electronic device manufacturing method, comprising: generating pulse laser light using a line narrowing laser device; outputting the pulse laser light to an exposure apparatus; and exposing a photosensitive substrate to the pulse laser light in the exposure apparatus to manufacture an electronic device, the line narrowing laser device including: an optical element and a diffractive optical element positioned on an optical path of an optical resonator; a wavelength actuator configured to change an incident angle of light incident on the diffractive optical element by moving the optical element; a wavelength driver configured to drive the wavelength actuator; a processor configured to receive a plurality of target wavelengths and output a wavelength control signal to the wavelength driver so that a wavelength of the pulse laser light output from the optical resonator periodically changes among the target wavelengths, thereby performing two-wavelength oscillation or multiple-wavelength oscillation; and a notch filter arranged in a path of the wavelength control signal and configured to operate at a notch frequency different from a drive frequency of the wavelength actuator.