High voltage feedthrough and connector for a charged particle apparatus
AssigneeASML Netherlands B.V.
InventorsBoudewijn Weijert Herman Jan Van Der Kroon, Jurgen Van Soest
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Abstract
Disclosed herein is a connector for electrically connecting a feedthrough of a vacuum tool to a high voltage power source, the connector comprising: a connector wire assembly configured to be in electrical connection with a high voltage power source; and a connector insulator comprising a channel configured to extend into the connector insulator and to receive a feedthrough pin so as to electrically connect the connector wire assembly with the feedthrough pin; wherein the connector insulator is configured to engage with the feedthrough so that a boundary surface of the connector insulator extends substantially bi-directionally in the direction of the longitudinal axis of the channel.
Claims20
A connector for electrically connecting a feedthrough of a vacuum tool to a high voltage power source, the connector comprising:
- a connector wire assembly configured to be in electrical connection with the high voltage power source, the wire assembly comprising a plug which is for receiving a first end of a feedthrough pin of the feedthrough;
- and
- a connector insulator comprising a tubular structure having a channel configured to extend into the connector insulator and to receive the feedthrough pin so as to electrically connect the connector wire assembly with the feedthrough pin;
- wherein:
- the connector insulator is configured to engage with an opening in the feedthrough so that a boundary surface of the connector insulator extends substantially bi-directionally in the direction of the longitudinal axis of the channel, the boundary surface substantially extending into the connector insulator;
- and
- the boundary surface defining a creep length distance between electrically conductive surfaces that is greater than a minimum creep length distance required to prevent electrical breakdown and flashover at high voltage operation.
A feedthrough for providing a high voltage power supply to a device in a vacuum tool, the feedthrough comprising:
- a feedthrough insulator configured to engage with a connector;
- and
- a feedthrough pin that protrudes from a recessed surface of the feedthrough insulator so that an end of the feedthrough pin protrudes from the feedthrough insulator;
- wherein the feedthrough pin is configured to electrically connect to a connector wire assembly of the connector;
- and
- the feedthrough insulator comprises a boundary surface that extends substantially bi-directionally in the direction of the longitudinal axis of the feedthrough pin, wherein the boundary surface defines a creep length distance between electrically conductive surfaces that is greater than a minimum creep length distance required to prevent electrical breakdown and flashover at high voltage operation.
A high voltage connector for connecting a feedthrough of a vacuum apparatus to a high voltage power source, the high voltage connector comprising:
- a connector pin configured to connect electrically with a feedthrough pin of the feedthrough;
- a connector body of insulating material configured to be insertably engageable with the feedthrough to connect electrically the connector pin and the feedthrough pin;
- wherein the connector body provides a bi-directional boundary surface that extends in the direction of the connector pin, wherein the boundary surface defines a creep length distance between electrically conductive surfaces that is greater than a minimum creep length distance required to prevent electrical breakdown and flashover at high voltage operation.
Dependencies are inferred from the claim text.