# US 12,763,300 B2 · Methods for detecting arcing in power delivery systems for process chambers > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,763,300 B2 - Document ID: US12763300B2 - Status: Granted - Kind: B2 - Application number: 17/351,355 - Filed: 2021-06-18 - Published: 2022-12-22 - Granted: 2026-10-13 - Earliest claimed: 2021-06-18 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: Yue Guo; Yang Yang; Kartik Ramaswamy - Web page: https://patentgrep.com/patent/US12763300B2 ## CPC - H01J 37/32944: {Arc detection} - H01J 37/32082: {Radio frequency generated discharge (H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence)} - H01J 2237/0206: Extinguishing, preventing or controlling unwanted discharges - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract Methods for detecting arcs in power delivery systems for plasma process chambers leverage visible arc detection sensors to facilitate in locating the arc and shutting down a power source associated with arc location. In some embodiments, the method includes receiving an arc indication from an arc detection sensor operating in a visible light spectrum where the at least one arc detection sensor is positioned in an assembly of a power delivery system for a plasma process chamber, determining a location of the arc indication by an arc detection controller of the plasma process chamber, and activating a safety interlock signal to the power source of the power delivery system of the plasma process chamber when the at least one arc indication exceeds a threshold value. The safety interlock signal controls a power status of the power source and activating the safety interlock signal removes power source power. ## Claims ### Claim 1 A method for detecting arcing in a power delivery system, comprising: receiving at least one arc indication from at least one arc detection sensor operating in a visible light spectrum, the at least one arc detection sensor positioned in at least one assembly of at least one power delivery system for a plasma process chamber; determining at least one location of the at least one arc indication by an arc detection controller of the plasma process chamber; and activating at least one safety interlock signal to at least one power source of the at least one power delivery system of the plasma process chamber when the at least one arc indication exceeds a threshold value, the at least one safety interlock signal controlling a power status of the at least one power source wherein activating the at least one safety interlock signal removes power from the at least one power source. ### Claim 2 (depends on 1) The method of claim 1, wherein the at least one arc indication includes intensity of an arc, duration of an arc, or location of an arc within an assembly of the power delivery system. ### Claim 3 (depends on 2) The method of claim 2, wherein one of the at least one arc detection sensor is configured to provide an intensity of an arc in a range of approximately 10,000 lux to approximately 20,000 lux. ### Claim 4 (depends on 1) The method of claim 1, wherein one of the at least one arc detection sensor is a fiber optic sensor. ### Claim 5 (depends on 4) The method of claim 4, wherein a plurality of fiber optic sensors is positioned in one of the at least one assembly of the at least one power delivery system to monitor specific parts. ### Claim 6 (depends on 1) The method of claim 1, wherein one of the at least one arc detection sensor has a 180 degree field of detection. ### Claim 7 (depends on 1) The method of claim 1, wherein one of the at least one arc detection sensor has a 360 degree field of detection. ### Claim 8 (depends on 1) The method of claim 1, further comprising: receiving operating parameters from a controller of the plasma process chamber associated with a time of the at least one arc indication; and providing a diagnosis of possible causes of the at least one arc indication based, at least in part, on the operating parameters, the at least one arc indication, and the at least one location of the at least one arc indication. ### Claim 9 (depends on 8) The method of claim 8, wherein operating parameters from the controller of the plasma process chamber include chamber pressure, power level, chemistry of a process, impedance match network capacitor positions, or chamber impedance. ### Claim 10 (depends on 1) The method of claim 1, further comprising: providing an indication of the location of the at least one arc indication, wherein the indication is viewable by personnel operating the plasma process chamber. ### Claim 11 A method for detecting arcing in a power delivery system, comprising: receiving at least one arc indication from at least one arc detection sensor operating in a visible light spectrum, the at least one arc detection sensor positioned in at least one assembly of at least one power delivery system for a plasma process chamber, wherein the at least one arc indication includes intensity of an arc, duration of an arc, or location of an arc within an assembly of the power delivery system and wherein at least one arc detection sensor is configured to provide an intensity of an arc in a range of approximately 10,000 lux to approximately 20,000 lux; determining at least one location of the at least one arc indication by an arc detection controller of the plasma process chamber; and activating at least one safety interlock signal to at least one power source of the at least one power delivery system of the plasma process chamber when the at least one arc indication exceeds a threshold value, the at least one safety interlock signal controlling a power status of the at least one power source wherein activating the at least one safety interlock signal removes power from the at least one power source. ### Claim 12 (depends on 11) The method of claim 11, wherein one of the at least one arc detection sensor is a fiber optic sensor. ### Claim 13 (depends on 12) The method of claim 12, wherein a plurality of fiber optic sensors is positioned in one of the at least one assembly of the at least one power delivery system to monitor specific parts. ### Claim 14 (depends on 11) The method of claim 11, wherein one of the at least one arc detection sensor has a 180 degree field of detection or a 360 degree field of detection. ### Claim 15 (depends on 11) The method of claim 11, further comprising: receiving operating parameters from a controller of the plasma process chamber associated with an occurrence of the at least one arc indication; and providing a diagnosis of possible causes of the at least one arc indication based, at least in part, on the operating parameters, the at least one arc indication, and the at least one location of the at least one arc indication. ### Claim 16 (depends on 15) The method of claim 15, wherein operating parameters from the controller of the plasma process chamber include chamber pressure, power level, chemistry of a process, impedance match network capacitor positions, or chamber impedance. ### Claim 17 (depends on 11) The method of claim 11, further comprising: providing an indication of the location of the at least one arc indication, wherein the indication is viewable by personnel operating the plasma process chamber. ### Claim 18 A non-transitory, computer readable medium having instructions stored thereon that, when executed, cause a method for detecting arcs in a power delivery system to be performed, the method comprising: receiving at least one arc indication from at least one arc detection sensor operating in a visible light spectrum, the at least one arc detection sensor positioned in at least one assembly of at least one power delivery system for a plasma process chamber; determining at least one location of the at least one arc indication by an arc detection controller of the plasma process chamber; and activating at least one safety interlock signal to at least one power source of the at least one power delivery system of the plasma process chamber when the at least one arc indication exceeds a threshold value, the at least one safety interlock signal controlling a power status of the at least one power source wherein activating the at least one safety interlock signal removes power from the at least one power source. ### Claim 19 (depends on 18) The non-transitory, computer readable medium of claim 18, wherein the method further comprises: receiving operating parameters from a controller of the plasma process chamber associated with an occurrence of the at least one arc indication; and providing a diagnosis of possible causes of the at least one arc indication based, at least in part, on the operating parameters, the at least one arc indication, and the at least one location of the at least one arc indication. ### Claim 20 (depends on 19) The non-transitory, computer readable medium of claim 19, wherein operating parameters from the controller of the plasma process chamber include chamber pressure, power level, chemistry of a process, impedance match network capacitor positions, or chamber impedance.